KR970009775B1 - Manufacture of impregnated type cathode - Google Patents

Manufacture of impregnated type cathode Download PDF

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KR970009775B1
KR970009775B1 KR1019940008865A KR19940008865A KR970009775B1 KR 970009775 B1 KR970009775 B1 KR 970009775B1 KR 1019940008865 A KR1019940008865 A KR 1019940008865A KR 19940008865 A KR19940008865 A KR 19940008865A KR 970009775 B1 KR970009775 B1 KR 970009775B1
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cathode
impregnated
bao
gas
negative electrode
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KR1019940008865A
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KR950030190A (en
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김영구
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엘지전자 주식회사
구자홍
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/04Manufacture of electrodes or electrode systems of thermionic cathodes

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  • Manufacturing & Machinery (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

A method of a cathode which is used for a cathode ray tube is disclosed. The method comprises the steps of: heating a composite of tungsten W and In2O3 to form a pellet; forming a cathode base by combining the pellet with a melted composite of BAO, CaO, and Al2O3; and coating the cathode base with an element such as Os, Ru, Ir, Re or like.

Description

함침형 음극의 제조방법Manufacturing method of impregnated cathode

제1도는 함침형 음극 구조도.1 is an impregnated cathode structure.

제2는 본 발명의 제조공정도.2 is a manufacturing process diagram of the present invention.

제3도는 Ba의 증발효과를 나타낸 그래프.3 is a graph showing the evaporation effect of Ba.

제4도는 포화전류밀도를 나타낸 그래프.4 is a graph showing the saturation current density.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 음극자체 2 : 음극컵1: Cathode itself 2: Cathode cup

3 : 음극슬리브 6 : 피복층3: cathode sleeve 6: coating layer

본 발명은 함침형 음극에 관한 것으로, 특히 브라운관등의 전자관에 사용되는 함침형 음극의 전자방출 특성이 저온동작에서 가능하며 고전류 밀도하에서 사용수명이 증대되는데 적당한 함침형 음극의 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an impregnated cathode, and more particularly, to a method of manufacturing an impregnated cathode suitable for electron emission characteristics of an impregnated cathode used in an electron tube such as a CRT, in low temperature operation, and to increase its service life under high current density.

함침형 음극은 고전류 밀도를 필요로하는 오실로스코프, 촬상관, 우주송신관등에 사용되어 왔으나 모니터, TV 등에 사용되는 브라운관의 대형화 및 고정세화 추세에 따라 고전류 밀도용 음극인 함침형 음극이 필요하게 되었다. 제1도는 일반적인 함침형 음극의 구조를 나타낸 것으로, 텅스텐(W)등과 같은 내열성 재질을 압축, 소결하여 제작한 다공성펠렛(pellet)상인 소결체내에 전자파 방사물질인 바륨세라믹스(BaO, CaO, Al2O3가 몰비율로 4 : 1 : 1 또는 5 : 3 : 2로 된 혼합물)가 약 1600℃의 진공 또는 수소분위기에서 용융 함침형된 음극기체(1)를 탄탈륨(Ta) 또는 몰리브덴(Mo) 등으로 된 내열금속인 음극컵(2)의 내부에 삽입시키고 측면을 레이져(Laser) 용접한다.Impregnated cathodes have been used in oscilloscopes, imaging tubes, space transmitters, etc. that require high current densities, but the need for impregnated cathodes, which are cathodes for high current densities, has increased due to the trend toward larger and higher resolution CRTs used in monitors and TVs. 1 shows a structure of a general impregnated cathode, and barium ceramics (BaO, CaO, Al 2 O), which are electromagnetic radiation materials in a sintered compact, which is a porous pellet prepared by compressing and sintering a heat resistant material such as tungsten (W). to 3 the molar ratio of 4: 1: 1 or 5: 3: 2 mixture) is also melted in a vacuum or hydrogen atmosphere at about 1600 ℃ such as a needle-like cathode gas (1), tantalum (Ta) or molybdenum (Mo) It is inserted into the inside of the negative electrode cup (2), which is a heat-resistant metal, and laser welded the side.

그리고, 음극컵(2)의 외측면에 내열금속(Ta 또는 Mo등의 금속)으로된 원통형 음극슬리브(3)를 부착 고정하며, 이 음극슬리브(3)는 내열금속(Ta 또는 Mo)으로된 음극홀더(4)에 3개 스트랩(strap)을 이용, 스트랩 한쪽끝은 음극슬리브(3)하단에, 그리고 스트랩의 다른 한쪽끝은 음극홀더(4)의 상단에 용접한다.In addition, a cylindrical negative electrode sleeve 3 made of a heat-resistant metal (metal such as Ta or Mo) is attached and fixed to the outer surface of the negative electrode cup 2, and the negative electrode sleeve 3 is made of a heat-resistant metal (Ta or Mo). Using three straps for the cathode holder 4, one end of the strap is welded to the bottom of the cathode sleeve 3 and the other end of the strap to the top of the cathode holder 4.

음극슬리브(3)내부에는 음극가열용 히터(5)를 삽입하며, 음극기체(1)상부에는 백금족 원소인 오스뮴(Os), 루테늄(Ru), 이리듐(Ir), 레늄(Re) 등의 희토류 금속으로 된 피복층(6)을 스퍼터링(Sputtering)법으로 형성한다.A cathode heating heater 5 is inserted into the cathode sleeve 3, and rare earths such as osmium (Os), ruthenium (Ru), iridium (Ir), and rhenium (Re), which are platinum group elements, are inserted on the cathode gas (1). The coating layer 6 made of metal is formed by the sputtering method.

이와같은 구조에서 히터(5)에 전류가 인가되면 히터에서 발생한 열이 음극슬리브(3)및 음극컵(2)에 이어서 음극기체(1)에 전도되므로 음극기체(1)의 다공성 펠렛내부에 용융함침된 전자방사물질인 혼합산화물이 음극기체(1)의 주성분인 W과 반응하여 Ba/BaO가 생성되며 이때 생성된 Ba/BaO는 음극기체 상부로 확산하여 음극기체 상부에서 단원자층을 형성하여 전자방사에 기여한다.In such a structure, when a current is applied to the heater 5, heat generated in the heater is conducted to the cathode gas 3 after the cathode sleeve 3 and the cathode cup 2, thereby melting inside the porous pellet of the anode gas 1. The mixed oxide, which is an impregnated electron radiating material, reacts with W, which is the main component of the negative electrode gas 1, to form Ba / BaO. The generated Ba / BaO diffuses over the negative electrode gas to form a monoatomic layer on the upper part of the negative electrode gas. Contributes to radiation.

이와같은 혼합산화물로 이루어진 음극기체 구조의 함침형 음극은 높은 전자방출능력을 가진 반면 동작온도가 1050∼1200℃로 높고 전자방출 물질인 Ba가 증발하거나 가열히터가 장시간 사용에 견디지 못하는 등의 문제가 있어 음극기체(1)표면에 일함수가 높은 Os,Ru,Ir,Re등의 백금족 원소 또는 레늄(Re)등의 희토류 원소를 피복하며, 이 피복효과에 의해 음극기체 표면에 Ba의 농도가 높아져 일함수가 낮아지고 동작온도가 약 100∼150℃정도 낮추어진다.While the impregnated cathode of the cathode gas structure made of such mixed oxide has high electron emission capability, the operating temperature is high at 1050∼1200 ℃, and there are problems such as evaporation of Ba, an electron-emitting material, or a heating heater that cannot withstand long time use. The surface of the cathode gas (1) is coated with a platinum group element such as Os, Ru, Ir, Re, or a rare earth element such as rhenium (Re), and the concentration of Ba is increased on the surface of the cathode gas by the coating effect. The work function is lowered and the operating temperature is lowered by about 100 ~ 150 ℃.

그러나 여전히 동작온도는 950∼1100℃로 높고, 이는 전자총의 전극부품 및 음극지체등에 고열로 인해 열변형을 일으켜 특성에 나쁜 영향을 미친다.However, the operating temperature is still high at 950-1100 ° C., which causes thermal deformation due to high heat in the electrode parts of the electron gun and the negative electrode housing, thus adversely affecting the characteristics.

또한 고온 동작을 하기 위해서는 히터의 용량을 크게 해야 되는데 이는 히터의 수명 단축문제 또는 신뢰성을 보장할수 없게 되는등의 문제점이 있어왔다.In addition, in order to operate at a high temperature, the capacity of the heater must be increased, which has been a problem such as shortening the lifetime of the heater or being unable to guarantee reliability.

본 발명은 상기한 종래 함침형 음극의 문제점을 해결하기 위하여 안출한 것으로, 음극의 동작온도가 850∼950℃의 저온동작이 가능하며 고전류 밀도하에서 저온동작이 가능하고 긴수명 및 우수한 신뢰성을 갖는 함침형 음극을 제공하고자 하는데 목적이 있다.The present invention has been made to solve the problems of the conventional impregnated cathode, the operating temperature of the cathode is capable of low temperature operation of 850 ~ 950 ℃ and low temperature operation under high current density and has a long life and excellent reliability It is an object to provide a needle-shaped cathode.

상기 목적을 달성하기 위한 본 발명은 바륨, 칼슘, 알루미네이트등의 전자방사물질을 다공성 펠렛에 용융함침시켜 제조하는 함침형 음극에 있어서, 함침형 음극기체 제작시 텅스텐 분말에 In2O3를 혼합하여 이를 수소 및 진공분위기에서 가열하여 다공체를 갖는 펠렛(pellet)를 얻는 단계와, 상기 펠렛기공에 BaO, CaO, Al2O3를 용융함침하여 음극기체를 얻는 단계와, 상기 음극기체 상부에 백금족 원소 또는 회토류 원소를 피복하는 단계로 하여 함침형 음극을 얻게 된다.In order to achieve the above object, the present invention provides an impregnated cathode prepared by melting and impregnating an electron-emitting material such as barium, calcium, aluminate into a porous pellet, and mixing In 2 O 3 with tungsten powder when preparing an impregnated cathode gas. Obtaining a pellet having a porous body by heating the same in a hydrogen atmosphere and a vacuum atmosphere; and obtaining a cathode gas by melting and impregnating BaO, CaO, and Al 2 O 3 into the pellet pores, and a platinum group on the cathode gas. The impregnated cathode is obtained by coating the element or the rare earth element.

상기 구성에서 텅스텐 분말의 크기는 3∼8㎛정도가 적합하며, 펠렛기공에 함침되는 BaO : CaO : Al2O3는 4 : 1 : 1 또는 5 : 3 : 2의 몰(mol)비율로 혼합하여서 된 것이다.In this configuration, the size of tungsten powder is suitably about 3 to 8 μm, and BaO: CaO: Al 2 O 3 impregnated in the pellet pores is mixed in a molar ratio of 4: 1: 1 or 5: 3: 2. It was done.

제2도는 본 발명의 제조공정도로써 이에따라 구체적으로 설명한다.2 is a manufacturing process diagram of the present invention will be described in detail accordingly.

먼저 다공성 텅스텐 음극기체 제조시 입자직경 3∼8㎛의 텅스텐(W)분말에 1∼5㎛중량%의 In2O3분말을 고르게 혼합하여 압출성형한후 환원성(수소)분위기에서 가소결하고, 진공중에서 최종소결하여 기공율 20∼30%인 다공성 펠렛을 제작한다.First, when preparing a porous tungsten anode gas, 1 to 5 μm by weight of In 2 O 3 powder is uniformly mixed with tungsten (W) powder having a particle diameter of 3 to 8 μm, followed by extrusion molding and pre-sintering in a reducing (hydrogen) atmosphere. Final sintering in vacuum produces a porous pellet having a porosity of 20-30%.

그리고 전자방사물질인 BaCO3,CaCO3,Al2O3가 최종적으로 BaO : CaO : Al2O3=4 : 1 : 1의 몰비율이 되게끔 칭향한후 탄산염이 서로 고르게 혼합되도록 혼합하여 1200℃에서 열처리하여 바륨세라믹스를 제조한다.BaCO 3 , CaCO 3 , and Al 2 O 3 , which are electron-emitting materials, are finally oriented at a molar ratio of BaO: CaO: Al 2 O 3 = 4: 1: 1, and then mixed so that carbonates are evenly mixed with each other. The barium ceramics are prepared by heat treatment at 占 폚.

그후 분쇄 및 혼합한 바륨 세라믹스 파우더(powder)를 상기 제작한 다공질 텅스텐 펠렛 상부에 올려 놓고 진공중 1600℃에서 용융함침시킨다.The pulverized and mixed barium ceramic powder is then placed on top of the prepared porous tungsten pellets and melt impregnated at 1600 ° C. in vacuum.

이와같이 함침된 음극기체 상부에 이리듐(Ir), 오스뮴(Os), 루테늄(Ru)등을 스퍼터링 법으로 피복하여 피복층(6)을 형성한다.In this way, the coating layer 6 is formed by coating iridium (Ir), osmium (Os), ruthenium (Ru), or the like on the impregnated cathode gas by sputtering.

상기와 같이 제작한 음극기체를 제1도와 같이 Mo 또는 Ta로 제작한 음극컵(2)에 삽입용접하고, 음극컵을 음극슬리브(3)에 레이져 용접고정하며 음극슬리브 내부에는 음극을 가열하기 위한 히터(5)를 삽입설치하여 함침형 음극을 완성한다. 상기와 같은 함침형 음극은 히터의 가열에 의해 음극기체내의 바륨, 칼슘, 알루미네이트와 텅스텐(W)이 반응하게 되고 W이 바륨 산화물의 산소와 결합되게 되므로 유리 Ba원자를 형성시킨다.Insert and weld the negative electrode gas produced as described above to the negative electrode cup 2 made of Mo or Ta as shown in FIG. 1, fix the negative electrode cup to the negative electrode sleeve 3 by laser welding, and heat the negative electrode inside the negative electrode sleeve. Insert the heater 5 to complete the impregnated cathode. In the impregnated cathode as described above, barium, calcium, aluminate and tungsten (W) in the cathode gas react with each other by heating of the heater, and W is combined with oxygen of barium oxide to form free Ba atoms.

이 유리 Ba가 W과 In으로 구성되는 다공성금속기체의 기공벽을 통해 표면으로 확산되며 그 표면에서 바륨(Ba), 인듐(In) 및 산소(O)가 결합하여 Ba-In-O로 된 단분자층을 형성하게 되며, 이 단분자층을 일함수를 낮추는 역할을 하기 때문에 낮은 온도에서도 열전자를 방출한다.The glass Ba diffuses to the surface through the pore wall of the porous metal gas composed of W and In, and at this surface, the barium (Ba), indium (In) and oxygen (O) combine to form a single molecule of Ba-In-O. The monomolecular layer emits hot electrons even at low temperatures because it serves to lower the work function.

산화인듐(In2O3)은 약 850℃에서 휘발성을 갖는 물질로써 음극의 활성화공정 처리시 바륨, 칼슘, 알루미네이트와 텅스텐이 반응하여 전자방출에 기여하는 유리 Ba/BaO를 생성시킬때의 온도, 즉 활성화 온도를 저감시킴과 동시에 O3자체가 고온에서 반응성이 좋은 물질이므로 활성화시간을 단축시켜주는 활성촉진제 역활을 하게 된다.Indium oxide (In 2 O 3 ) is a volatile material at about 850 ° C. The temperature when barium, calcium, aluminate and tungsten react to produce free Ba / BaO, which contributes to electron emission during the activation process of the cathode. In other words, it reduces the activation temperature and at the same time O 3 itself is a good reactive material at high temperature, and thus acts as an activation accelerator to shorten the activation time.

따라서 본 발명에 따른 디스펜서음극은 활성화 온도가 종래보다 약 100∼200℃정도 낮아지며 활성화시간도 약 1시간 정도 단축된다.Therefore, the dispenser cathode according to the present invention has an activation temperature lowered by about 100 to 200 ° C. and an activation time of about 1 hour.

그러나 In2O3의 분산량이 1중량%이하일경우 분산된 In2O3량이 너무 작아 In2O3첨가분산의 효과가 없고, In2O3분산량이 5중량%이상일 경우 전자방사 표면에 형성되는 단분자층, 즉 Ba-Ib-O상부에 과도한 산소(O)분자가 결합하여 단분자층의 쌍극자 효과를 반감시켜 오히려 전자방사를 억제하므로 바람직하지 않게 된다.However, the amount of the amount of dispersion of the In 2 O 3 dispersed In 2 O when 1% by weight, less than 3 too small to In 2 O 3 without the effect of the added dispersion, In 2 O 3 dispersion amount is formed on the electron emission surface, if 5% or more by weight Excessive oxygen (O) molecules are bonded to the monomolecular layer, that is, Ba-Ib-O, thereby reducing the dipole effect of the monomolecular layer, thereby suppressing electron emission, which is undesirable.

이상에서와 같이 In계함침형 음극은 종래 기본형의 함침형 음극에 비해 표면상의 Ba(또는 BaO)밀도가 높고, 복합 다공질 금속기체의 표면부위에 Ba-In-O로 이루어지는 단분자층이 형성되며, 상기 단분자층은 전기 쌍극자 모멘트가 크고, 제3도 및 제4도와 같이 Ba증발비가 낮고 전기 쌍극과의 밀도가 높기 때문에 일함수를 낮게 하는 것이 가능하고, Ir Os/Ru등으로 이루어지는 복합다공질 금속기체에 형성되는 박막층은 복합 다공질 금속기체 표면상의 Ba(또는 BaO)의 표면체재시간을 증가시킨다.As described above, the In-based impregnated cathode has a higher Ba (or BaO) density on the surface than the conventional impregnated cathode, and a monolayer of Ba-In-O is formed on the surface of the composite porous metal gas. Since the electric dipole moment is large, the Ba evaporation ratio is low and the density with the electric dipole is high, as shown in Figs. 3 and 4, the work function can be made low, and it is formed on the composite porous metal substrate made of Ir Os / Ru. The thin film layer increases the surface residence time of Ba (or BaO) on the surface of the composite porous metal substrate.

즉, Ir 또는 Os/Ru등의 박막층에 의한 Ba(또는 BaO)의 체재시간증가는 Ba-In-O로 된 전기쌍극자 밀도를 증가시켜 일함수를 낮추게 되는 것이다.In other words, the increase in the residence time of Ba (or BaO) by a thin film layer such as Ir or Os / Ru increases the electric dipole density of Ba-In-O, thereby lowering the work function.

Claims (3)

텅스텐(W)분말에 산화인듐(In2O3)을 혼합하여 이를 환원성 분위기 및 진공분위기에서 가열하여 기공을 갖는 펠렛(pellet)을 얻는 단계와, 상기 펠렛기공에 BaO, CaO, Al2O3를 용융함침하여 음극기체(1)를 얻는단계와, 상기 음극기체(1)상부에 백금족원소 또는 회토류 원소를 피복하는 단계로 이루어짐을 특징으로하는 함침형 음극의 제조방법.Mixing tungsten (W) powder with indium oxide (In 2 O 3 ) and heating it in a reducing atmosphere and vacuum atmosphere to obtain pellets having pores, and BaO, CaO, Al 2 O 3 in the pellet pores. A method of manufacturing an impregnated cathode, comprising melting and impregnating to obtain a cathode gas (1) and coating a platinum group element or a rare earth element on the cathode gas (1). 제1항에 있어서, 산화인듐(In2O3)이 1∼5중량%인것을 특징으로하는 함침형 음극의 제조방법.The method of claim 1, wherein the indium oxide (In 2 O 3 ) is 1 to 5% by weight. 제1항에 있어서, BaO, CaO, Al2O3가 4 : 1 : 1 또는 5 : 3 : 2의 몰(mol)비율로 혼합된 것임을 특징으로 하는 함침형 음극의 제조방법.The method of claim 1, wherein BaO, CaO, Al 2 O 3 is mixed at a molar ratio of 4: 1: 1 or 5: 3: 2.
KR1019940008865A 1994-04-26 1994-04-26 Manufacture of impregnated type cathode KR970009775B1 (en)

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