KR970009470A - Thin film heater - Google Patents

Thin film heater Download PDF

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Publication number
KR970009470A
KR970009470A KR1019950022980A KR19950022980A KR970009470A KR 970009470 A KR970009470 A KR 970009470A KR 1019950022980 A KR1019950022980 A KR 1019950022980A KR 19950022980 A KR19950022980 A KR 19950022980A KR 970009470 A KR970009470 A KR 970009470A
Authority
KR
South Korea
Prior art keywords
thin film
type heater
substrate
heater according
exothermic
Prior art date
Application number
KR1019950022980A
Other languages
Korean (ko)
Other versions
KR100187292B1 (en
Inventor
브래스키나 스베트라나
Original Assignee
조남인
브래스키나 스베트라나
윤세원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 조남인, 브래스키나 스베트라나, 윤세원 filed Critical 조남인
Priority to KR1019950022980A priority Critical patent/KR100187292B1/en
Publication of KR970009470A publication Critical patent/KR970009470A/en
Application granted granted Critical
Publication of KR100187292B1 publication Critical patent/KR100187292B1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/267—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an organic material, e.g. plastic

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)

Abstract

본 발명은 절열성을 갖는 기판(1); 상기 기판 표면에 형성되어 전기 에너지를 열 에너지로 변환하는 발열박막(2); 및 외부로부터 상기 발열박막에 전류를 공급하는 전극(3); 및 상기 발열 박막의 표면에 형성되어 상기 발열 박막을 보호하는 보호막(4)을 구비하는 것을 특징으로 하는 박막형 전열기에 관한 것으로, 종래의 전열기에 비하여 재료의 소비가 적고, 가벼우며, 온도를 올리고 내리는데 걸리는 시간이 현저히 단축되어 전력의 낭비를 크게 줄이는 효과가 있으며, 또한 휠 수 있는 재료 위에 제작할 수 있어서 전열기의 구조와 모양이 자유롭게 변형되며, 전열기의 성능 및 응용 범위를 크게 확대시킬 수 있는 효과가 있도록 한 것이다.The present invention provides a substrate (1) having heat resistance; A heat generating thin film (2) formed on the substrate surface to convert electrical energy into thermal energy; And an electrode (3) for supplying a current to the heating thin film from the outside; And a protective film 4 formed on the surface of the exothermic thin film to protect the exothermic thin film. The thin film type heater is characterized in that the material consumption is lighter, lighter, and the temperature is raised and lowered as compared with the conventional heater. Significantly shortened the time required, greatly reducing the waste of power, and can be fabricated on the material that can be bent, so that the structure and shape of the heater can be freely deformed, and to greatly expand the performance and application range of the heater. It is.

Description

박막형 전열기Thin film heater

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 일실시예에 따른 박막형 전열기의 단면도, 제3도는 본 발명의 다른 실시예에 따른 박막형 전열기의 평면도, 제4도는 본 발명의 또 다른 실시예에 따른 박막형 전열기의 평면도.1 is a cross-sectional view of a thin film heater according to an embodiment of the present invention, 3 is a plan view of a thin film heater according to another embodiment of the present invention, Figure 4 is a plan view of a thin film heater according to another embodiment of the present invention.

Claims (12)

절연성을 갖는 기판; 상기 기판 표면에 형성되어 전기 에너지를 열 에너지로 변환하는 발열박막; 및 외부로부터 상기 발열 박막에 전류를 공급하는 전극을 구비하는 것을 특징으로 하는 박막형 전열기.An insulating substrate; An exothermic thin film formed on the substrate surface to convert electrical energy into thermal energy; And an electrode for supplying current to the heat generating thin film from the outside. 제1항에 있어서, 상기 발열 박막의 표면에 형성되어 상기 발열 박막을 보호하는 보호막을 더 구비하는 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 1, further comprising a protective film formed on a surface of the heat generating thin film to protect the heat generating thin film. 제2항에 있어서, 상기 발열 박막은 상기 기판 상 일정 부위에 소정 모양으로 형성되는 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 2, wherein the heat generating thin film is formed in a predetermined shape on the substrate. 제3항에 있어서, 상기 발열 박막은 금속성 물질을 함유하고 있는 물질로 형성되는 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 3, wherein the exothermic thin film is formed of a material containing a metallic material. 제3항에 있어서, 상기 발열 박막은 반도체 물질을 함유하고 있는 물질로 형성되는 것을 특징으로 하는 박막형 전열기.The thin film type heater of claim 3, wherein the exothermic thin film is formed of a material containing a semiconductor material. 제3항에 있어서, 상기 발열 박막은 실리콘과 탄소의 합금 물질, 실리콘과 보론의 합금 물질, 실리콘과 금속성 물질의 합금 물질 중 어느 하나로 형성되는 것을 특징으로 하는 박막형 전열기.The thin film type heater of claim 3, wherein the exothermic thin film is formed of any one of an alloy material of silicon and carbon, an alloy material of silicon and boron, and an alloy material of silicon and metallic material. 제4항 또는 제6항에 있어서, 상기 금속성 물질은 니트롬, 탄탈, 니켈, 구리, 크롬, 알루미늄, 몰리브덴, 텅스텐 중 어느 하나인 것을 특징으로 하는 박막형 전열기.The thin film heater according to claim 4 or 6, wherein the metallic material is any one of nitrom, tantalum, nickel, copper, chromium, aluminum, molybdenum and tungsten. 제4항 내지 제6항 중 어느 한 항에 있어서, 상기 발열 박막은 화확 기상 증착(CVD;Chemical Vapor Deposition)방법, 스퍼터링(sputtering)방법, 전자빔 증착(electron-beam evaporation)방법, 열 증착(thermal evaporation)방법, 스크린 프린팅 방법(screen printing)중 어느 하나를 이용하여 형성되는 것을 특징으로 하는 박막형 전열기.The method of claim 4, wherein the exothermic thin film has a chemical vapor deposition (CVD) method, a sputtering method, an electron-beam evaporation method, or a thermal vapor deposition method. Thin film type heater, characterized in that formed using any one of the evaporation method, screen printing (screen printing) method. 제8항에 있어서, 상기 기판을 형성하는 재료는 세라믹인 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 8, wherein the material forming the substrate is ceramic. 제8항에 있어서, 상기 기판은 휠 수 있는 기판인 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 8, wherein the substrate is a bendable substrate. 제10항에 있어서, 상기 기판을 형성하는 재료는 폴리이미드인 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 10, wherein the material forming the substrate is polyimide. 제8항에 있어서, 상기 보호막은 알루미늄 산화막, 알루미늄 질화막, 실리콘 산화막, 실리콘 질화막 중 어느 하나인 것을 특징으로 하는 박막형 전열기.The thin film type heater according to claim 8, wherein the protective film is any one of an aluminum oxide film, an aluminum nitride film, a silicon oxide film, and a silicon nitride film. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950022980A 1995-07-28 1995-07-28 Thin film heater KR100187292B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950022980A KR100187292B1 (en) 1995-07-28 1995-07-28 Thin film heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950022980A KR100187292B1 (en) 1995-07-28 1995-07-28 Thin film heater

Publications (2)

Publication Number Publication Date
KR970009470A true KR970009470A (en) 1997-02-24
KR100187292B1 KR100187292B1 (en) 1999-05-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020081847A (en) * 2001-04-20 2002-10-30 조남인 apparatus for emitting heat

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006065058A1 (en) * 2004-12-14 2006-06-22 Hyung Woo Kim Heating apparatus of electronic pot device
KR20060067860A (en) * 2004-12-14 2006-06-20 김형우 A heating apparatus for cooking device
WO2006065059A1 (en) * 2004-12-14 2006-06-22 Hyung Woo Kim Heating apparatus of electronic hot wind device
KR101063512B1 (en) * 2009-01-14 2011-09-07 주식회사 티앤비나노일렉 Electric toaster
KR101059958B1 (en) * 2009-02-13 2011-08-26 주식회사 티앤비나노일렉 Electric hot plate
KR101642700B1 (en) * 2015-05-19 2016-07-27 주식회사 대화알로이테크 Pot for vehicle
KR102554012B1 (en) * 2022-10-05 2023-07-10 이종문 Ceramic heaters including thin film type heater and electrode and their manufacturing methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020081847A (en) * 2001-04-20 2002-10-30 조남인 apparatus for emitting heat

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KR100187292B1 (en) 1999-05-15

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