KR970007343A - Portable air pollution meter - Google Patents
Portable air pollution meter Download PDFInfo
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- KR970007343A KR970007343A KR1019950020374A KR19950020374A KR970007343A KR 970007343 A KR970007343 A KR 970007343A KR 1019950020374 A KR1019950020374 A KR 1019950020374A KR 19950020374 A KR19950020374 A KR 19950020374A KR 970007343 A KR970007343 A KR 970007343A
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- South Korea
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- gas
- gas sensor
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- air pollution
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Abstract
본 발명은 어레이형 마이크로 가스센서와 패턴 인식 기법을 이용하여 저전력으로 공기 오염도를 감지하는 휴대용 공기 오염 측정기에 관한 것이다.The present invention relates to a portable air pollution meter for detecting air pollution at low power using an array type micro gas sensor and a pattern recognition technique.
본 발명은 휴대용 전원장치를 사용하여 각 부에 전원을 공급하는 전원 공급부와, 복수의 가스를 감지하는 어레이형 가스 센서부와, 상기 가스 센서부의 출력으로부터 얻은 값과 미리 입력된 값을 비교 및 연산하여 패턴 인식으로 가스의 종류와 가스의 오염 상태를 분석 및 인식하는 신호 처리부와, 상기 신호 처리부로부터의 처리 결과를 표시하는 표시부로 구성하고, 실리콘 웨이퍼의 앞면에 제1절연층, 마이크로 히터, 제2절연층, 전극, 가스를 감지하는 감지막의 순서로 박막이 차례로 적층되고, 상기 실리콘 웨이퍼의 뒷면을 화학식각하여 다이아프램 구조를 갖도록 상기 가스 센서부의 가스 센서를 형성함으로써, 소형의 휴대용 공기 오염도 측정기의 제작이 가능하므로 밀폐된 공간, 특히 위험성 가스의 농도가 기준치 이상으로 될 가능성이 있는 공간에서 작업을 해야 하는 사람 각자에게 휴대토록 하면 작업자의 건강과 생명을 보호할 수 있고, 또한, 여러 가스가 혼재된 상황에서 특정 가스의 농도를 판별해 낼 수 있으므로 공기 오염도 측정뿐만 아니라 구체적인 오염 가스의 종류와 농도까지 표시될 수 있게 되어 일반적인 가스 센서의 응용에도 확대 적용할 수 있다.The present invention compares and computes a power supply unit for supplying power to each unit using a portable power supply unit, an array-type gas sensor unit sensing a plurality of gases, and a value inputted from an output of the gas sensor unit and a value previously inputted. And a display unit for analyzing and recognizing the type of gas and the contamination state of the gas by pattern recognition, and a display unit for displaying the processing result from the signal processor, wherein the first insulating layer, the micro heater, 2, the thin film is sequentially stacked in the order of the insulating layer, the electrode, the sensing film for detecting the gas, and by forming a gas sensor of the gas sensor unit to have a diaphragm structure by formulating the back side of the silicon wafer, the compact portable air pollution meter It is possible to fabricate an enclosed space, in particular a space where the concentration of dangerous gases may exceed If you carry it to each person who needs to work in the liver, you can protect the health and life of the worker, and it is possible to determine the concentration of a specific gas in the presence of various gases. The type and concentration can be displayed so that it can be extended to general gas sensor applications.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 따른 휴대용 공기 오염 측정기를 나타낸 블럭도, 제3도는 (가)는 상기 제2도의 가스 센서 제조 공정을 나타낸 단면도, (나)는 상기 (가)의 평면도.Figure 2 is a block diagram showing a portable air pollution meter according to the present invention, Figure 3 is a cross-sectional view showing the gas sensor manufacturing process of Figure 2 (a), (b) is a plan view of the (a).
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950020374A KR970007343A (en) | 1995-07-11 | 1995-07-11 | Portable air pollution meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950020374A KR970007343A (en) | 1995-07-11 | 1995-07-11 | Portable air pollution meter |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970007343A true KR970007343A (en) | 1997-02-21 |
Family
ID=66526830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950020374A KR970007343A (en) | 1995-07-11 | 1995-07-11 | Portable air pollution meter |
Country Status (1)
Country | Link |
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KR (1) | KR970007343A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100265284B1 (en) * | 1997-05-28 | 2000-09-15 | 윤종용 | Measuring method and apparatus for watersoluble contaminants in the air in clean room |
KR100844966B1 (en) * | 2006-02-17 | 2008-07-09 | 주식회사 오토전자 | Apparatus and sensor assembly for detecting gas |
WO2017082609A1 (en) * | 2015-11-11 | 2017-05-18 | 삼성전자 주식회사 | Electronic device and method for utilizing gas sensor |
-
1995
- 1995-07-11 KR KR1019950020374A patent/KR970007343A/en not_active Application Discontinuation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100265284B1 (en) * | 1997-05-28 | 2000-09-15 | 윤종용 | Measuring method and apparatus for watersoluble contaminants in the air in clean room |
KR100844966B1 (en) * | 2006-02-17 | 2008-07-09 | 주식회사 오토전자 | Apparatus and sensor assembly for detecting gas |
WO2017082609A1 (en) * | 2015-11-11 | 2017-05-18 | 삼성전자 주식회사 | Electronic device and method for utilizing gas sensor |
KR20170055216A (en) * | 2015-11-11 | 2017-05-19 | 삼성전자주식회사 | Electronic apparatus and method for utilizing gas sesnsors |
US11099164B2 (en) | 2015-11-11 | 2021-08-24 | Samsung Electronics Co., Ltd. | Electronic device and method for utilizing gas sensor |
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E902 | Notification of reason for refusal | ||
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