KR970003276U - 반도체 제조장비의 패키지 배출부 슈트 덮개구조 - Google Patents

반도체 제조장비의 패키지 배출부 슈트 덮개구조

Info

Publication number
KR970003276U
KR970003276U KR2019950012941U KR19950012941U KR970003276U KR 970003276 U KR970003276 U KR 970003276U KR 2019950012941 U KR2019950012941 U KR 2019950012941U KR 19950012941 U KR19950012941 U KR 19950012941U KR 970003276 U KR970003276 U KR 970003276U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
package cover
chute structure
equipment chute
Prior art date
Application number
KR2019950012941U
Other languages
English (en)
Other versions
KR0122050Y1 (ko
Inventor
정면국
이영화
Original Assignee
아남산업주식회사
아남정공주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남산업주식회사, 아남정공주식회사 filed Critical 아남산업주식회사
Priority to KR2019950012941U priority Critical patent/KR0122050Y1/ko
Publication of KR970003276U publication Critical patent/KR970003276U/ko
Application granted granted Critical
Publication of KR0122050Y1 publication Critical patent/KR0122050Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chutes (AREA)
KR2019950012941U 1995-06-09 1995-06-09 반도체 제조장비의 패키지 배출부 슈트 덮개구조 KR0122050Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950012941U KR0122050Y1 (ko) 1995-06-09 1995-06-09 반도체 제조장비의 패키지 배출부 슈트 덮개구조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950012941U KR0122050Y1 (ko) 1995-06-09 1995-06-09 반도체 제조장비의 패키지 배출부 슈트 덮개구조

Publications (2)

Publication Number Publication Date
KR970003276U true KR970003276U (ko) 1997-01-24
KR0122050Y1 KR0122050Y1 (ko) 1998-07-15

Family

ID=19415175

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950012941U KR0122050Y1 (ko) 1995-06-09 1995-06-09 반도체 제조장비의 패키지 배출부 슈트 덮개구조

Country Status (1)

Country Link
KR (1) KR0122050Y1 (ko)

Also Published As

Publication number Publication date
KR0122050Y1 (ko) 1998-07-15

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