KR960043843A - Light path controller - Google Patents

Light path controller Download PDF

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Publication number
KR960043843A
KR960043843A KR1019950013351A KR19950013351A KR960043843A KR 960043843 A KR960043843 A KR 960043843A KR 1019950013351 A KR1019950013351 A KR 1019950013351A KR 19950013351 A KR19950013351 A KR 19950013351A KR 960043843 A KR960043843 A KR 960043843A
Authority
KR
South Korea
Prior art keywords
membrane
lower electrode
groove
pad
axis direction
Prior art date
Application number
KR1019950013351A
Other languages
Korean (ko)
Other versions
KR0159392B1 (en
Inventor
김영일
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR1019950013351A priority Critical patent/KR0159392B1/en
Publication of KR960043843A publication Critical patent/KR960043843A/en
Application granted granted Critical
Publication of KR0159392B1 publication Critical patent/KR0159392B1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

본 발명은 광로 조절 장치에 관한 것으로서, 트랜지스터가 매트릭스 형태로 내장되고 표면에 각각의 트랜지스터에 전기적으로 연결된 패드를 갖는 구동기판과, 상기 구동기판의 상부에 X축 방향의 일측이 접촉되고 타측이 에어갭에 의해 이격되어 Y축 방향으로 평행하게 형성된 그루브에 의해 분리되는 멤브레인과, 상기 멤브레인의 표면에 형성된 하부전극과, 상기패드와 하부전극을 전기적으로 연결하도록 상기 멤브레인을 관통하여 형성된 플러그와, 상기 하부전극의 상부에 상기 그루브를 채우도록 형성된 변형부와, 상기 변형부의 상부에 형성되며 반사막으로도 사용되는 상부전극으로 이루어진 액츄에이터를 포함한다. 따라서, 본 발명은 멤브레인에 그루브를 형성하여 멤브레인을 분리함으로써 멤브레인의 상부와 하부의밀도차에 의한 압축응력을 최소화하고 희생막 제거시 액츄에이터의 휨을 방지하여 반사각과 반사율의 조정을 용이하게 할수 있다.The present invention relates to an optical path control device, comprising: a driving substrate having a transistor embedded in a matrix and having pads electrically connected to respective transistors on a surface thereof; A membrane separated by a groove spaced apart by a gap and formed in parallel in the Y-axis direction, a lower electrode formed on the surface of the membrane, a plug formed through the membrane to electrically connect the pad and the lower electrode, And an actuator formed on the lower electrode to fill the groove, and an upper electrode formed on the deformation part and used as a reflective film. Accordingly, the present invention can form a groove in the membrane to separate the membrane to minimize the compressive stress due to the density difference between the upper and lower portions of the membrane, and to prevent the bending of the actuator during the removal of the sacrificial film to facilitate adjustment of the reflection angle and reflectance.

Description

광로 조절 장치Light path controller

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명에 따른 광로 조절 장치의 평면도, 제4도는 제3도를 b-b선으로 자른 본 발명의 실시예에 따른 광로 조절 장치의 단면도.3 is a plan view of an optical path adjusting apparatus according to the present invention, and FIG. 4 is a cross-sectional view of an optical path adjusting apparatus according to an embodiment of the present invention, taken along line b-b of FIG.

Claims (2)

트랜지스터가 매트릭스 형태로 내장되고 표면에 각각의 트랜지스터에 전기적으로 연결된 패드(53)를 갖는구동기판(51)과, 상기 구동기판(51)의 상부에 X축 방향의 일측이 접촉되고 타측이 에어갭(67)에 의해 이격되어 Y축 방향으로 평행하게 형성된 그루브(59)에 의해 분리되는 멤브레인(55)과, 상기 멤브레인(55)의 표면에 형성된 하부전극(61)과,상기 패드(53)와 하부전극(61)을 전기적으로 연결하도록 상기 멤브레인(55)을 관통하여 형성된 플러그(57)와, 상기 하부전극(61)의 상부에 상기 그루브(59)를 채우도록 형성된 변형부(63)와, 상기 변형부(63)의 상부에 형성되며, 반사막으로도사용되는 상부전극(65)으로 이루어진 액츄에이터(80)를 포함하는 광로 조절장치.A driving substrate 51 having a pad 53 embedded in a matrix and electrically connected to each transistor on a surface thereof, and one side of the driving substrate 51 in contact with an X-axis direction and the other side of the air gap A membrane 55 separated by a groove 59 spaced apart by a 67 and formed in parallel in the Y-axis direction, a lower electrode 61 formed on a surface of the membrane 55, and the pad 53; A plug 57 formed through the membrane 55 to electrically connect the lower electrode 61, a deformable portion 63 formed to fill the groove 59 on the lower electrode 61; And an actuator (80) formed on the deformable portion (63) and formed of an upper electrode (65) that is also used as a reflective film. 제1항에 있어서, 상기 그루브(59)가 다수개로 형성되어 상기 멤브레인(55)을 다수개로 분리하는 광로 조절장치.The optical path control apparatus according to claim 1, wherein a plurality of grooves (59) are formed to separate the membranes (55). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950013351A 1995-05-26 1995-05-26 Optical projection system KR0159392B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950013351A KR0159392B1 (en) 1995-05-26 1995-05-26 Optical projection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950013351A KR0159392B1 (en) 1995-05-26 1995-05-26 Optical projection system

Publications (2)

Publication Number Publication Date
KR960043843A true KR960043843A (en) 1996-12-23
KR0159392B1 KR0159392B1 (en) 1999-01-15

Family

ID=19415482

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950013351A KR0159392B1 (en) 1995-05-26 1995-05-26 Optical projection system

Country Status (1)

Country Link
KR (1) KR0159392B1 (en)

Also Published As

Publication number Publication date
KR0159392B1 (en) 1999-01-15

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