KR960038736U - Wafer loading cassette - Google Patents

Wafer loading cassette

Info

Publication number
KR960038736U
KR960038736U KR2019950010588U KR19950010588U KR960038736U KR 960038736 U KR960038736 U KR 960038736U KR 2019950010588 U KR2019950010588 U KR 2019950010588U KR 19950010588 U KR19950010588 U KR 19950010588U KR 960038736 U KR960038736 U KR 960038736U
Authority
KR
South Korea
Prior art keywords
wafer loading
loading cassette
cassette
wafer
loading
Prior art date
Application number
KR2019950010588U
Other languages
Korean (ko)
Other versions
KR0125577Y1 (en
Inventor
박용준
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019950010588U priority Critical patent/KR0125577Y1/en
Publication of KR960038736U publication Critical patent/KR960038736U/en
Application granted granted Critical
Publication of KR0125577Y1 publication Critical patent/KR0125577Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950010588U 1995-05-18 1995-05-18 Cassette for wafer stacking KR0125577Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950010588U KR0125577Y1 (en) 1995-05-18 1995-05-18 Cassette for wafer stacking

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950010588U KR0125577Y1 (en) 1995-05-18 1995-05-18 Cassette for wafer stacking

Publications (2)

Publication Number Publication Date
KR960038736U true KR960038736U (en) 1996-12-18
KR0125577Y1 KR0125577Y1 (en) 1998-11-02

Family

ID=19413483

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950010588U KR0125577Y1 (en) 1995-05-18 1995-05-18 Cassette for wafer stacking

Country Status (1)

Country Link
KR (1) KR0125577Y1 (en)

Also Published As

Publication number Publication date
KR0125577Y1 (en) 1998-11-02

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee