KR960026258A - Multi-layer metal layer formation method using chemical vapor deposition - Google Patents
Multi-layer metal layer formation method using chemical vapor deposition Download PDFInfo
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- KR960026258A KR960026258A KR1019940033003A KR19940033003A KR960026258A KR 960026258 A KR960026258 A KR 960026258A KR 1019940033003 A KR1019940033003 A KR 1019940033003A KR 19940033003 A KR19940033003 A KR 19940033003A KR 960026258 A KR960026258 A KR 960026258A
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- titanium
- vapor deposition
- chemical vapor
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Abstract
본 발명은 반도체 소자 제조공정 중 화학기상 증착법을 이용한 다층의 금속층 형성방법에 관한 것으로, 예정된금속층 형성부위에 티타늄(Ti)을 함유하고 있는 유기금속 화합물을 소정의 플라즈마로써 분해하여 티타늄 층을 증착하는 단계; 상기 티타늄층 위에 티타늄을 함유하고 있는 유기 금속화합물을 분해하여 티타늄나이트라이드층을 증착하는 단계를 포함하여 이루어지는 것을 특징으로 한다.The present invention relates to a method for forming a multilayer metal layer using chemical vapor deposition in a semiconductor device manufacturing process. The method comprises depositing a titanium layer by decomposing an organometallic compound containing titanium (Ti) in a predetermined metal layer to a predetermined plasma. step; And decomposing an organometallic compound containing titanium on the titanium layer to deposit a titanium nitride layer.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1A도는 내지 제1D도는 본 발명의 일실시예에 따른 확산방지층 형성 과정을 나타내는 공정 단면도.1A through 1D are cross-sectional views illustrating a process of forming a diffusion barrier layer according to an embodiment of the present invention.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1019940033003A KR960026258A (en) | 1994-12-06 | 1994-12-06 | Multi-layer metal layer formation method using chemical vapor deposition |
Applications Claiming Priority (1)
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KR1019940033003A KR960026258A (en) | 1994-12-06 | 1994-12-06 | Multi-layer metal layer formation method using chemical vapor deposition |
Publications (1)
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KR960026258A true KR960026258A (en) | 1996-07-22 |
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Family Applications (1)
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KR1019940033003A KR960026258A (en) | 1994-12-06 | 1994-12-06 | Multi-layer metal layer formation method using chemical vapor deposition |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100336296B1 (en) * | 1999-07-30 | 2002-05-13 | 장세열 | Electric-Acoustic Transducer Having Dual Voice Coil Drivers |
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1994
- 1994-12-06 KR KR1019940033003A patent/KR960026258A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100336296B1 (en) * | 1999-07-30 | 2002-05-13 | 장세열 | Electric-Acoustic Transducer Having Dual Voice Coil Drivers |
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