KR960025340U - Automatic purifying device using THINNER - Google Patents

Automatic purifying device using THINNER

Info

Publication number
KR960025340U
KR960025340U KR2019940037078U KR19940037078U KR960025340U KR 960025340 U KR960025340 U KR 960025340U KR 2019940037078 U KR2019940037078 U KR 2019940037078U KR 19940037078 U KR19940037078 U KR 19940037078U KR 960025340 U KR960025340 U KR 960025340U
Authority
KR
South Korea
Prior art keywords
thinner
purifying device
automatic purifying
automatic
purifying
Prior art date
Application number
KR2019940037078U
Other languages
Korean (ko)
Other versions
KR200173458Y1 (en
Inventor
이상면
황선진
이승용
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940037078U priority Critical patent/KR200173458Y1/en
Publication of KR960025340U publication Critical patent/KR960025340U/en
Application granted granted Critical
Publication of KR200173458Y1 publication Critical patent/KR200173458Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
KR2019940037078U 1994-12-29 1994-12-29 Auto cleansing apparartus of using thinner KR200173458Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940037078U KR200173458Y1 (en) 1994-12-29 1994-12-29 Auto cleansing apparartus of using thinner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940037078U KR200173458Y1 (en) 1994-12-29 1994-12-29 Auto cleansing apparartus of using thinner

Publications (2)

Publication Number Publication Date
KR960025340U true KR960025340U (en) 1996-07-22
KR200173458Y1 KR200173458Y1 (en) 2000-03-02

Family

ID=19403768

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940037078U KR200173458Y1 (en) 1994-12-29 1994-12-29 Auto cleansing apparartus of using thinner

Country Status (1)

Country Link
KR (1) KR200173458Y1 (en)

Also Published As

Publication number Publication date
KR200173458Y1 (en) 2000-03-02

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee