KR960025329U - Sog 코팅기의 회전척 장치 - Google Patents

Sog 코팅기의 회전척 장치

Info

Publication number
KR960025329U
KR960025329U KR2019940035659U KR19940035659U KR960025329U KR 960025329 U KR960025329 U KR 960025329U KR 2019940035659 U KR2019940035659 U KR 2019940035659U KR 19940035659 U KR19940035659 U KR 19940035659U KR 960025329 U KR960025329 U KR 960025329U
Authority
KR
South Korea
Prior art keywords
coating machine
chuck device
rotary chuck
sog coating
sog
Prior art date
Application number
KR2019940035659U
Other languages
English (en)
Other versions
KR0128231Y1 (ko
Inventor
정성학
진희창
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940035659U priority Critical patent/KR0128231Y1/ko
Publication of KR960025329U publication Critical patent/KR960025329U/ko
Application granted granted Critical
Publication of KR0128231Y1 publication Critical patent/KR0128231Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
KR2019940035659U 1994-12-24 1994-12-24 Sog 코팅기의 회전척 장치 KR0128231Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035659U KR0128231Y1 (ko) 1994-12-24 1994-12-24 Sog 코팅기의 회전척 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035659U KR0128231Y1 (ko) 1994-12-24 1994-12-24 Sog 코팅기의 회전척 장치

Publications (2)

Publication Number Publication Date
KR960025329U true KR960025329U (ko) 1996-07-22
KR0128231Y1 KR0128231Y1 (ko) 1998-12-01

Family

ID=19402706

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035659U KR0128231Y1 (ko) 1994-12-24 1994-12-24 Sog 코팅기의 회전척 장치

Country Status (1)

Country Link
KR (1) KR0128231Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101024356B1 (ko) * 2008-11-28 2011-03-23 세메스 주식회사 기판 코팅 유닛, 이를 갖는 기판 처리 장치 및 이를 이용한기판 처리 방법

Also Published As

Publication number Publication date
KR0128231Y1 (ko) 1998-12-01

Similar Documents

Publication Publication Date Title
FI991162A (fi) Sähköstaattinen pidin
NO308637B1 (no) Rotasjonsmaskin
DE69505720T3 (de) Spindelgerät
DE69418878D1 (de) Spindelvorrichtung
DE69731138D1 (de) Rotierende elektrostatische Sprühvorrichtung
DK117595A (da) Holder for roterende værktøj
KR960025329U (ko) Sog 코팅기의 회전척 장치
DE69514855D1 (de) Beschichtungsvorrichtung
DE29519102U1 (de) Rotierendes Werkzeug
KR960029673U (ko) 로터리 트랜스
KR960020598U (ko) 로터리 척
DE69514272D1 (de) Beschichtungsvorrichtung
KR960036526U (ko) 회전용 위치결정 장치
KR970019728U (ko) 반도체 제조 장치의 회전 도포 장치
DE9416005U1 (de) Rotationswerkzeug
KR980005345U (ko) 반도체 디바이스 제조장치의 회전 도포 장치
DE59504706D1 (de) Streichvorrichtung
BR9500327A (pt) Bucha rotativa
KR960015613U (ko) 웨이퍼 척
KR970021021U (ko) 회전코팅장치
KR980005225U (ko) 회전식 작업대의 정지장치
KR970043916U (ko) 로터리 히터의 급유장치
KR980002915U (ko) 절연 코팅용액의 비산방지장치
KR970027550U (ko) 공작기계의 척장치
KR950025920U (ko) 기판회전장치

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050721

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee