KR960019136U - Semiconductor Wafer Transfer Shuttle - Google Patents

Semiconductor Wafer Transfer Shuttle

Info

Publication number
KR960019136U
KR960019136U KR2019940029353U KR19940029353U KR960019136U KR 960019136 U KR960019136 U KR 960019136U KR 2019940029353 U KR2019940029353 U KR 2019940029353U KR 19940029353 U KR19940029353 U KR 19940029353U KR 960019136 U KR960019136 U KR 960019136U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
wafer transfer
transfer shuttle
shuttle
semiconductor
Prior art date
Application number
KR2019940029353U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940029353U priority Critical patent/KR960019136U/en
Publication of KR960019136U publication Critical patent/KR960019136U/en

Links

KR2019940029353U 1994-11-05 1994-11-05 Semiconductor Wafer Transfer Shuttle KR960019136U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029353U KR960019136U (en) 1994-11-05 1994-11-05 Semiconductor Wafer Transfer Shuttle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029353U KR960019136U (en) 1994-11-05 1994-11-05 Semiconductor Wafer Transfer Shuttle

Publications (1)

Publication Number Publication Date
KR960019136U true KR960019136U (en) 1996-06-19

Family

ID=60846825

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029353U KR960019136U (en) 1994-11-05 1994-11-05 Semiconductor Wafer Transfer Shuttle

Country Status (1)

Country Link
KR (1) KR960019136U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application