KR960019077U - Device for reducing the difference in vacuum between chambers - Google Patents

Device for reducing the difference in vacuum between chambers

Info

Publication number
KR960019077U
KR960019077U KR2019940031946U KR19940031946U KR960019077U KR 960019077 U KR960019077 U KR 960019077U KR 2019940031946 U KR2019940031946 U KR 2019940031946U KR 19940031946 U KR19940031946 U KR 19940031946U KR 960019077 U KR960019077 U KR 960019077U
Authority
KR
South Korea
Prior art keywords
chambers
vacuum
reducing
difference
Prior art date
Application number
KR2019940031946U
Other languages
Korean (ko)
Other versions
KR200194077Y1 (en
Inventor
이현재
김명조
전재종
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940031946U priority Critical patent/KR200194077Y1/en
Publication of KR960019077U publication Critical patent/KR960019077U/en
Application granted granted Critical
Publication of KR200194077Y1 publication Critical patent/KR200194077Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR2019940031946U 1994-11-29 1994-11-29 Vacuum difference reduction apparatus bewteen chambers KR200194077Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940031946U KR200194077Y1 (en) 1994-11-29 1994-11-29 Vacuum difference reduction apparatus bewteen chambers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940031946U KR200194077Y1 (en) 1994-11-29 1994-11-29 Vacuum difference reduction apparatus bewteen chambers

Publications (2)

Publication Number Publication Date
KR960019077U true KR960019077U (en) 1996-06-19
KR200194077Y1 KR200194077Y1 (en) 2000-12-01

Family

ID=19399629

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940031946U KR200194077Y1 (en) 1994-11-29 1994-11-29 Vacuum difference reduction apparatus bewteen chambers

Country Status (1)

Country Link
KR (1) KR200194077Y1 (en)

Also Published As

Publication number Publication date
KR200194077Y1 (en) 2000-12-01

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Legal Events

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Year of fee payment: 10

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