KR960019071U - 파티클 제거 수단을 갖는 노광장비 - Google Patents
파티클 제거 수단을 갖는 노광장비Info
- Publication number
- KR960019071U KR960019071U KR2019940031266U KR19940031266U KR960019071U KR 960019071 U KR960019071 U KR 960019071U KR 2019940031266 U KR2019940031266 U KR 2019940031266U KR 19940031266 U KR19940031266 U KR 19940031266U KR 960019071 U KR960019071 U KR 960019071U
- Authority
- KR
- South Korea
- Prior art keywords
- removal means
- particle removal
- exposure equipment
- exposure
- equipment
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940031266U KR960019071U (ko) | 1994-11-25 | 1994-11-25 | 파티클 제거 수단을 갖는 노광장비 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940031266U KR960019071U (ko) | 1994-11-25 | 1994-11-25 | 파티클 제거 수단을 갖는 노광장비 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960019071U true KR960019071U (ko) | 1996-06-19 |
Family
ID=60850644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940031266U KR960019071U (ko) | 1994-11-25 | 1994-11-25 | 파티클 제거 수단을 갖는 노광장비 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960019071U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100576813B1 (ko) * | 1999-10-12 | 2006-05-10 | 삼성전자주식회사 | 반도체 노광 공정용 레티클의 먼지 제거 장치 |
-
1994
- 1994-11-25 KR KR2019940031266U patent/KR960019071U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100576813B1 (ko) * | 1999-10-12 | 2006-05-10 | 삼성전자주식회사 | 반도체 노광 공정용 레티클의 먼지 제거 장치 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |