KR960019071U - 파티클 제거 수단을 갖는 노광장비 - Google Patents

파티클 제거 수단을 갖는 노광장비

Info

Publication number
KR960019071U
KR960019071U KR2019940031266U KR19940031266U KR960019071U KR 960019071 U KR960019071 U KR 960019071U KR 2019940031266 U KR2019940031266 U KR 2019940031266U KR 19940031266 U KR19940031266 U KR 19940031266U KR 960019071 U KR960019071 U KR 960019071U
Authority
KR
South Korea
Prior art keywords
removal means
particle removal
exposure equipment
exposure
equipment
Prior art date
Application number
KR2019940031266U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940031266U priority Critical patent/KR960019071U/ko
Publication of KR960019071U publication Critical patent/KR960019071U/ko

Links

KR2019940031266U 1994-11-25 1994-11-25 파티클 제거 수단을 갖는 노광장비 KR960019071U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940031266U KR960019071U (ko) 1994-11-25 1994-11-25 파티클 제거 수단을 갖는 노광장비

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940031266U KR960019071U (ko) 1994-11-25 1994-11-25 파티클 제거 수단을 갖는 노광장비

Publications (1)

Publication Number Publication Date
KR960019071U true KR960019071U (ko) 1996-06-19

Family

ID=60850644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940031266U KR960019071U (ko) 1994-11-25 1994-11-25 파티클 제거 수단을 갖는 노광장비

Country Status (1)

Country Link
KR (1) KR960019071U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100576813B1 (ko) * 1999-10-12 2006-05-10 삼성전자주식회사 반도체 노광 공정용 레티클의 먼지 제거 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100576813B1 (ko) * 1999-10-12 2006-05-10 삼성전자주식회사 반도체 노광 공정용 레티클의 먼지 제거 장치

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination