KR960018768A - Leveling method and system of exposure equipment - Google Patents

Leveling method and system of exposure equipment Download PDF

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Publication number
KR960018768A
KR960018768A KR1019940031856A KR19940031856A KR960018768A KR 960018768 A KR960018768 A KR 960018768A KR 1019940031856 A KR1019940031856 A KR 1019940031856A KR 19940031856 A KR19940031856 A KR 19940031856A KR 960018768 A KR960018768 A KR 960018768A
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KR
South Korea
Prior art keywords
light
leveling
projection lens
lens
transmitted
Prior art date
Application number
KR1019940031856A
Other languages
Korean (ko)
Inventor
권병인
Original Assignee
김주용
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019940031856A priority Critical patent/KR960018768A/en
Publication of KR960018768A publication Critical patent/KR960018768A/en

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Abstract

본 발명은 레벨링을 위한 빛이 실제 노광 빛이 투과되는 노광장비의 프로젝션 렌즈를 투과하도록 하고 상기 투과되어 웨이퍼에 반사된 빛을 다시 프로젝션 렌즈를 통해 검출하여 레벨링하는 것을 특징으로 하는 노광장비의 레벨링 방법 및 그 시스템에 관한 것으로, 본 발명의 레벨링 시스템은 종래의 레벨링 시스템에서는 보상할 수 없었던 프로젝션 렌즈의 기울어짐도 효과적으로 보상할 수 있어, 감광막 패턴의 프로파일 불량을 감소시켜 소자의 수율 향상은 물론 장비의 점검 및 보수에 편리함을 가져다주는 효과가 있다.The present invention provides a leveling method of exposure equipment, characterized in that the light for leveling is transmitted through the projection lens of the exposure equipment through which the actual exposure light is transmitted, and the light transmitted through the projection lens is detected again through the projection lens. And the system, the leveling system of the present invention can effectively compensate for the inclination of the projection lens that could not be compensated in the conventional leveling system, reducing the poor profile of the photoresist pattern to improve the yield of the device as well as the equipment It is effective to bring convenience to inspection and repair.

Description

노광장비의 레벨링 방법 및 시스템Leveling method and system of exposure equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명의 일실시예에 따른 레벨링 시스템의 구조를 나타내는 단면도.2 is a cross-sectional view showing the structure of a leveling system according to an embodiment of the present invention.

Claims (2)

사진식각공정에 사용되는 노광장비의 레벨링 방법에 있어서; 레벨링을 의한 비치 실제 노광 투과되는 노광장비의 프로젝션 렌즈를 통과하도록 하고 상기 투과되어 웨이퍼에 반사된 빛을 다시 프로젝션 렌즈를 통해 검출하여 레벨링하는 것을 특징으로 하는 레벨링 방법.In the leveling method of the exposure equipment used in the photolithography process; Beach through exposure by leveling Leveling method characterized by passing through the projection lens of the exposure equipment to be transmitted, and detecting and leveling the light transmitted and reflected back to the wafer through the projection lens. 레벨링을 위해 빛을 발생하는 수단; 상기 빛 발생수단으로부터의 빛을 평행광으로 만드는 콜리메이팅 렌즈; 상기 콜리메이텅 렌즈로부터 나오는 빛을 전달받아 웨이퍼에 투사하고 웨이퍼에 반사된 빛을 다시받아 전달하는 프로젝션 렌즈; 상기 프로젝션 렌즈로부터 전달받은 빛을 한곳으로 모으는 콘덴서 렌즈; 상기 콘덴서 렌즈에 의해 모아진 빛을 검출하여 빛의 쉬프트 정도에 따라 웨이퍼 스테이지를 레벨링 하도록 레벨링 모듈에 그 신호를 전달하는 검출기를 포함하여 구성되는 것을 특징으로 하는 노광장비의 레벨링 시스템.Means for generating light for leveling; A collimating lens for converting light from the light generating means into parallel light; A projection lens that receives light from the collimated lens and projects it onto a wafer and receives and reflects light reflected from the wafer; A condenser lens for collecting light received from the projection lens into one place; And a detector for detecting the light collected by the condenser lens and transmitting a signal to the leveling module to level the wafer stage according to the degree of light shift. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940031856A 1994-11-29 1994-11-29 Leveling method and system of exposure equipment KR960018768A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940031856A KR960018768A (en) 1994-11-29 1994-11-29 Leveling method and system of exposure equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940031856A KR960018768A (en) 1994-11-29 1994-11-29 Leveling method and system of exposure equipment

Publications (1)

Publication Number Publication Date
KR960018768A true KR960018768A (en) 1996-06-17

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ID=66648840

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940031856A KR960018768A (en) 1994-11-29 1994-11-29 Leveling method and system of exposure equipment

Country Status (1)

Country Link
KR (1) KR960018768A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7535551B2 (en) 2004-09-02 2009-05-19 Samsung Electronics Co., Ltd. Projection lens unit with focus and level control, related exposure apparatus and method
US9083164B2 (en) 2011-09-27 2015-07-14 Yazaki Corporation Support structure for boss

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7535551B2 (en) 2004-09-02 2009-05-19 Samsung Electronics Co., Ltd. Projection lens unit with focus and level control, related exposure apparatus and method
US8102509B2 (en) 2004-09-02 2012-01-24 Samsung Electronics Co., Ltd. Focus and level control method for projection lens unit by comparing intensities of measurement light and reference light
US9083164B2 (en) 2011-09-27 2015-07-14 Yazaki Corporation Support structure for boss

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