KR960015618U - 웨이퍼 보관박스 - Google Patents

웨이퍼 보관박스

Info

Publication number
KR960015618U
KR960015618U KR2019940027680U KR19940027680U KR960015618U KR 960015618 U KR960015618 U KR 960015618U KR 2019940027680 U KR2019940027680 U KR 2019940027680U KR 19940027680 U KR19940027680 U KR 19940027680U KR 960015618 U KR960015618 U KR 960015618U
Authority
KR
South Korea
Prior art keywords
storage box
wafer storage
wafer
box
storage
Prior art date
Application number
KR2019940027680U
Other languages
English (en)
Other versions
KR0127244Y1 (ko
Inventor
이동건
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940027680U priority Critical patent/KR0127244Y1/ko
Publication of KR960015618U publication Critical patent/KR960015618U/ko
Application granted granted Critical
Publication of KR0127244Y1 publication Critical patent/KR0127244Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940027680U 1994-10-24 1994-10-24 웨이퍼 보관박스 KR0127244Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940027680U KR0127244Y1 (ko) 1994-10-24 1994-10-24 웨이퍼 보관박스

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940027680U KR0127244Y1 (ko) 1994-10-24 1994-10-24 웨이퍼 보관박스

Publications (2)

Publication Number Publication Date
KR960015618U true KR960015618U (ko) 1996-05-17
KR0127244Y1 KR0127244Y1 (ko) 1998-12-01

Family

ID=19396158

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940027680U KR0127244Y1 (ko) 1994-10-24 1994-10-24 웨이퍼 보관박스

Country Status (1)

Country Link
KR (1) KR0127244Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101644337B1 (ko) * 2014-03-14 2016-08-05 삼성중공업 주식회사 용접봉 보관 장치

Also Published As

Publication number Publication date
KR0127244Y1 (ko) 1998-12-01

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050620

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee