KR960015598U - 챔버내의 개스주입장치 - Google Patents

챔버내의 개스주입장치

Info

Publication number
KR960015598U
KR960015598U KR2019940026226U KR19940026226U KR960015598U KR 960015598 U KR960015598 U KR 960015598U KR 2019940026226 U KR2019940026226 U KR 2019940026226U KR 19940026226 U KR19940026226 U KR 19940026226U KR 960015598 U KR960015598 U KR 960015598U
Authority
KR
South Korea
Prior art keywords
chamber
injection device
gas injection
gas
injection
Prior art date
Application number
KR2019940026226U
Other languages
English (en)
Other versions
KR0119251Y1 (ko
Inventor
김익곤
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940026226U priority Critical patent/KR0119251Y1/ko
Publication of KR960015598U publication Critical patent/KR960015598U/ko
Application granted granted Critical
Publication of KR0119251Y1 publication Critical patent/KR0119251Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Fluid-Driven Valves (AREA)
KR2019940026226U 1994-10-07 1994-10-07 챔버내의 개스주입장치 KR0119251Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940026226U KR0119251Y1 (ko) 1994-10-07 1994-10-07 챔버내의 개스주입장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940026226U KR0119251Y1 (ko) 1994-10-07 1994-10-07 챔버내의 개스주입장치

Publications (2)

Publication Number Publication Date
KR960015598U true KR960015598U (ko) 1996-05-17
KR0119251Y1 KR0119251Y1 (ko) 1998-08-01

Family

ID=19395045

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940026226U KR0119251Y1 (ko) 1994-10-07 1994-10-07 챔버내의 개스주입장치

Country Status (1)

Country Link
KR (1) KR0119251Y1 (ko)

Also Published As

Publication number Publication date
KR0119251Y1 (ko) 1998-08-01

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