KR960015590U - 반도체 제조용 더블 핫 플레이트식 오븐장치 - Google Patents
반도체 제조용 더블 핫 플레이트식 오븐장치Info
- Publication number
- KR960015590U KR960015590U KR2019940028065U KR19940028065U KR960015590U KR 960015590 U KR960015590 U KR 960015590U KR 2019940028065 U KR2019940028065 U KR 2019940028065U KR 19940028065 U KR19940028065 U KR 19940028065U KR 960015590 U KR960015590 U KR 960015590U
- Authority
- KR
- South Korea
- Prior art keywords
- hot plate
- semiconductor manufacturing
- oven system
- double hot
- plate oven
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940028065U KR960015590U (ko) | 1994-10-27 | 1994-10-27 | 반도체 제조용 더블 핫 플레이트식 오븐장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940028065U KR960015590U (ko) | 1994-10-27 | 1994-10-27 | 반도체 제조용 더블 핫 플레이트식 오븐장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960015590U true KR960015590U (ko) | 1996-05-17 |
Family
ID=60851704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940028065U KR960015590U (ko) | 1994-10-27 | 1994-10-27 | 반도체 제조용 더블 핫 플레이트식 오븐장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960015590U (ko) |
-
1994
- 1994-10-27 KR KR2019940028065U patent/KR960015590U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |