KR960015590U - 반도체 제조용 더블 핫 플레이트식 오븐장치 - Google Patents

반도체 제조용 더블 핫 플레이트식 오븐장치

Info

Publication number
KR960015590U
KR960015590U KR2019940028065U KR19940028065U KR960015590U KR 960015590 U KR960015590 U KR 960015590U KR 2019940028065 U KR2019940028065 U KR 2019940028065U KR 19940028065 U KR19940028065 U KR 19940028065U KR 960015590 U KR960015590 U KR 960015590U
Authority
KR
South Korea
Prior art keywords
hot plate
semiconductor manufacturing
oven system
double hot
plate oven
Prior art date
Application number
KR2019940028065U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940028065U priority Critical patent/KR960015590U/ko
Publication of KR960015590U publication Critical patent/KR960015590U/ko

Links

KR2019940028065U 1994-10-27 1994-10-27 반도체 제조용 더블 핫 플레이트식 오븐장치 KR960015590U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940028065U KR960015590U (ko) 1994-10-27 1994-10-27 반도체 제조용 더블 핫 플레이트식 오븐장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940028065U KR960015590U (ko) 1994-10-27 1994-10-27 반도체 제조용 더블 핫 플레이트식 오븐장치

Publications (1)

Publication Number Publication Date
KR960015590U true KR960015590U (ko) 1996-05-17

Family

ID=60851704

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940028065U KR960015590U (ko) 1994-10-27 1994-10-27 반도체 제조용 더블 핫 플레이트식 오븐장치

Country Status (1)

Country Link
KR (1) KR960015590U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application