KR960015089A - Exposure method using optical fiber - Google Patents

Exposure method using optical fiber Download PDF

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Publication number
KR960015089A
KR960015089A KR1019940026830A KR19940026830A KR960015089A KR 960015089 A KR960015089 A KR 960015089A KR 1019940026830 A KR1019940026830 A KR 1019940026830A KR 19940026830 A KR19940026830 A KR 19940026830A KR 960015089 A KR960015089 A KR 960015089A
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KR
South Korea
Prior art keywords
optical fiber
exposure method
exposure
unit cells
selectively
Prior art date
Application number
KR1019940026830A
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Korean (ko)
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KR0142789B1 (en
Inventor
허훈
Original Assignee
문정환
금성일렉트론 주식회사
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Priority to KR1019940026830A priority Critical patent/KR0142789B1/en
Publication of KR960015089A publication Critical patent/KR960015089A/en
Application granted granted Critical
Publication of KR0142789B1 publication Critical patent/KR0142789B1/en

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Abstract

본 발명은 광섬유를 이용한 노광방법에 관한 것으로, 고해상도의 패턴을 형성하기 위한 것이다.The present invention relates to an exposure method using an optical fiber, to form a pattern of high resolution.

본 발명은 노광영역을 작은 단위셀로 세분화시키고 각각의 단위셀에 전기적으로 온/오프가 가능한 광섬유를 연결한 노광원을 이용하여 형성하고자 하는 패턴형태에 해당하는 상기 단위셀들에 연결된 광섬유를 선택적으로 온상태가 되도록 하여 패터닝하고자 하는 기판상에 형성된 레지스트를 선택적으로 노광하는 광섬유를 이용한 노광방법을 제공함으로써 레티클 통과시 발생되는 광회절효과등을 제거하여 고해상도의 패턴형성을 가능하게 하고 생산성을 증대시킨다.The present invention selectively divides an exposure area into small unit cells and selectively selects optical fibers connected to the unit cells corresponding to the pattern form to be formed by using an exposure source in which an optical fiber capable of electrically on / off is connected to each unit cell. By providing an exposure method using an optical fiber that selectively exposes the resist formed on the substrate to be patterned by turning it on, the optical diffraction effect generated when passing the reticle is eliminated to enable high-resolution pattern formation and increase productivity. Let's do it.

Description

광섬유를 이용한 노광방법Exposure method using optical fiber

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명의 광섬유를 이용한 노광방법을 도시한 개괄도.3 is a schematic view showing an exposure method using the optical fiber of the present invention.

Claims (1)

노광영역을 작은 단위셀로 세분화시키고 각각의 단위셀에 전기적으로 온/오프가 가능한 광섬유를 연결한 노광원을 이용하여 형성하고자 하는 패턴형태에 해당하는 상기 단위셀들에 연결된 광섬유를 선택적으로 온상태가 되도록 하여 패터닝하고자 하는 기판상에 형성된 레지스트를 선택적으로 노광하는 것을 특징으로 하는 광섬유를 이용한 노광방법.Selectively turn on the optical fiber connected to the unit cells corresponding to the pattern type to be formed by using an exposure source in which an exposure area is subdivided into small unit cells and an optical fiber which is electrically on / off is connected to each unit cell. And selectively exposing a resist formed on the substrate to be patterned so as to be a light source. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940026830A 1994-10-20 1994-10-20 Exposure method using optical fiber KR0142789B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940026830A KR0142789B1 (en) 1994-10-20 1994-10-20 Exposure method using optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940026830A KR0142789B1 (en) 1994-10-20 1994-10-20 Exposure method using optical fiber

Publications (2)

Publication Number Publication Date
KR960015089A true KR960015089A (en) 1996-05-22
KR0142789B1 KR0142789B1 (en) 1998-07-01

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940026830A KR0142789B1 (en) 1994-10-20 1994-10-20 Exposure method using optical fiber

Country Status (1)

Country Link
KR (1) KR0142789B1 (en)

Also Published As

Publication number Publication date
KR0142789B1 (en) 1998-07-01

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