KR960009274U - Clamp air supply for preventing wafer chipping - Google Patents

Clamp air supply for preventing wafer chipping

Info

Publication number
KR960009274U
KR960009274U KR2019940020974U KR19940020974U KR960009274U KR 960009274 U KR960009274 U KR 960009274U KR 2019940020974 U KR2019940020974 U KR 2019940020974U KR 19940020974 U KR19940020974 U KR 19940020974U KR 960009274 U KR960009274 U KR 960009274U
Authority
KR
South Korea
Prior art keywords
air supply
clamp air
preventing wafer
wafer chipping
chipping
Prior art date
Application number
KR2019940020974U
Other languages
Korean (ko)
Other versions
KR0116363Y1 (en
Inventor
최영일
김광성
진기현
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940020974U priority Critical patent/KR0116363Y1/en
Publication of KR960009274U publication Critical patent/KR960009274U/en
Application granted granted Critical
Publication of KR0116363Y1 publication Critical patent/KR0116363Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
KR2019940020974U 1994-08-19 1994-08-19 Wafer clamp KR0116363Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940020974U KR0116363Y1 (en) 1994-08-19 1994-08-19 Wafer clamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940020974U KR0116363Y1 (en) 1994-08-19 1994-08-19 Wafer clamp

Publications (2)

Publication Number Publication Date
KR960009274U true KR960009274U (en) 1996-03-16
KR0116363Y1 KR0116363Y1 (en) 1998-04-22

Family

ID=19391070

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940020974U KR0116363Y1 (en) 1994-08-19 1994-08-19 Wafer clamp

Country Status (1)

Country Link
KR (1) KR0116363Y1 (en)

Also Published As

Publication number Publication date
KR0116363Y1 (en) 1998-04-22

Similar Documents

Publication Publication Date Title
DE69842191D1 (en) Wafer holder
DE59510926D1 (en) chuck
DE69500752D1 (en) Wafer carrier
DE69610068D1 (en) SEMICONDUCTOR SUPPLY DEVICE
NO962299D0 (en) Fresh air supply device
KR960009274U (en) Clamp air supply for preventing wafer chipping
KR960015613U (en) Wafer chuck
KR960006359U (en) Wafer holding chuck
KR980000107U (en) Air supply
KR960019141U (en) Particle-proof wafer chuck
KR960012675U (en) Wafer chuck
KR960019139U (en) Wafer chipping prevention clamp
KR950034371U (en) Wafer holder
KR950028699U (en) Wafer holder
KR950031497U (en) Wafer holder
KR960025264U (en) Wafer holder
KR970046599U (en) Wafer chuck
KR970050339U (en) Gas supply system for semiconductor devices
KR960025437U (en) Pedestal for Wafer Holding
KR970064208U (en) Wafer chuck
KR960025432U (en) Wafer holding device
KR960006354U (en) Wafer holding device
KR960025431U (en) Detachable wafer clamp
KR950034368U (en) Wafer Fixture
KR950034339U (en) Wafer for wafer handling

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090102

Year of fee payment: 12

EXPY Expiration of term