KR960009267U - 마노미터가 장착된 반도체 공정튜브 - Google Patents

마노미터가 장착된 반도체 공정튜브

Info

Publication number
KR960009267U
KR960009267U KR2019940021010U KR19940021010U KR960009267U KR 960009267 U KR960009267 U KR 960009267U KR 2019940021010 U KR2019940021010 U KR 2019940021010U KR 19940021010 U KR19940021010 U KR 19940021010U KR 960009267 U KR960009267 U KR 960009267U
Authority
KR
South Korea
Prior art keywords
manometer
semiconductor process
process tube
tube equipped
semiconductor
Prior art date
Application number
KR2019940021010U
Other languages
English (en)
Other versions
KR200194076Y1 (ko
Inventor
박현문
박찬호
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940021010U priority Critical patent/KR200194076Y1/ko
Publication of KR960009267U publication Critical patent/KR960009267U/ko
Application granted granted Critical
Publication of KR200194076Y1 publication Critical patent/KR200194076Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Fluid Pressure (AREA)
KR2019940021010U 1994-08-20 1994-08-20 마노미터가 장착된 반도체 공정튜브 KR200194076Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940021010U KR200194076Y1 (ko) 1994-08-20 1994-08-20 마노미터가 장착된 반도체 공정튜브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940021010U KR200194076Y1 (ko) 1994-08-20 1994-08-20 마노미터가 장착된 반도체 공정튜브

Publications (2)

Publication Number Publication Date
KR960009267U true KR960009267U (ko) 1996-03-16
KR200194076Y1 KR200194076Y1 (ko) 2000-09-01

Family

ID=19391101

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940021010U KR200194076Y1 (ko) 1994-08-20 1994-08-20 마노미터가 장착된 반도체 공정튜브

Country Status (1)

Country Link
KR (1) KR200194076Y1 (ko)

Also Published As

Publication number Publication date
KR200194076Y1 (ko) 2000-09-01

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