KR960009256U - 개스 라인 펌핑장치 - Google Patents

개스 라인 펌핑장치

Info

Publication number
KR960009256U
KR960009256U KR2019940020887U KR19940020887U KR960009256U KR 960009256 U KR960009256 U KR 960009256U KR 2019940020887 U KR2019940020887 U KR 2019940020887U KR 19940020887 U KR19940020887 U KR 19940020887U KR 960009256 U KR960009256 U KR 960009256U
Authority
KR
South Korea
Prior art keywords
gas line
pumping device
line pumping
gas
pumping
Prior art date
Application number
KR2019940020887U
Other languages
English (en)
Other versions
KR0124714Y1 (ko
Inventor
이현재
김대현
전재종
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940020887U priority Critical patent/KR0124714Y1/ko
Publication of KR960009256U publication Critical patent/KR960009256U/ko
Application granted granted Critical
Publication of KR0124714Y1 publication Critical patent/KR0124714Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
KR2019940020887U 1994-08-18 1994-08-18 개스 라인 펌핑장치 KR0124714Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940020887U KR0124714Y1 (ko) 1994-08-18 1994-08-18 개스 라인 펌핑장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940020887U KR0124714Y1 (ko) 1994-08-18 1994-08-18 개스 라인 펌핑장치

Publications (2)

Publication Number Publication Date
KR960009256U true KR960009256U (ko) 1996-03-16
KR0124714Y1 KR0124714Y1 (ko) 1999-02-18

Family

ID=19391006

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940020887U KR0124714Y1 (ko) 1994-08-18 1994-08-18 개스 라인 펌핑장치

Country Status (1)

Country Link
KR (1) KR0124714Y1 (ko)

Also Published As

Publication number Publication date
KR0124714Y1 (ko) 1999-02-18

Similar Documents

Publication Publication Date Title
DE69508515T2 (de) Druckgerät
DE69510046T2 (de) Abgabevorrichtung
BR9508012A (pt) Aparelho
KR960014673A (ko) 분할관펌프
DE69501586T2 (de) Abgabevorrichtung
DE59606709D1 (de) Pumpvorrichtung
NO308555B1 (no) Kompressoranordning
DE69504868T2 (de) Gasextraktionsvorrichtung
DE69613766D1 (de) Gasabgabeeinrichtung
DE59505135D1 (de) Saugvorrichtung
ATA147094A (de) Tauchgiessrohr
DE69502822D1 (de) Feuchtigkeitsabsorbierendes gerät
DE69509177D1 (de) Druckgerät
DE69500731D1 (de) Kraftstoffpumpenvorrichtung
DE69725295D1 (de) Gasentladungsvorrichtung
FI945874A0 (fi) Pumppu
DE69709454T2 (de) Kraftstoffpumpenvorrichtung
KR960009256U (ko) 개스 라인 펌핑장치
KR960012667U (ko) 가스라인 연결 장치
DE69500697D1 (de) Kraftstoffpumpenvorrichtung
KR960018192U (ko) 가스차단장치
KR960002349U (ko) 파이프 연결장치
KR950023546U (ko) 펌프
KR960002976U (ko) 조작장치
SE9401066D0 (sv) Pumpanordning

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050523

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee