KR960009196A - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof Download PDF

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Publication number
KR960009196A
KR960009196A KR1019950016071A KR19950016071A KR960009196A KR 960009196 A KR960009196 A KR 960009196A KR 1019950016071 A KR1019950016071 A KR 1019950016071A KR 19950016071 A KR19950016071 A KR 19950016071A KR 960009196 A KR960009196 A KR 960009196A
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South Korea
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region
source
forming
active region
drain
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KR1019950016071A
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Korean (ko)
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KR100200890B1 (en
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토시유끼 오아시
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기다오까 다까시
미쓰비시 뎅끼 가부시끼가이샤
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Publication of KR960009196A publication Critical patent/KR960009196A/en
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Publication of KR100200890B1 publication Critical patent/KR100200890B1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78696Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel

Abstract

메모리로서의 신뢰성이 저하하는 것을 방지하여 얻은 SOI 구조의 메모리 셀을 가지는 반도체장치 및 그의 제조방법을 제공한다.Provided are a semiconductor device having a memory cell of an SOI structure obtained by preventing the reliability of the memory from deteriorating, and a manufacturing method thereof.

활성영역(4)의 상부 표면상의 소정영역에 전기적으로 접촉하도록 채널영역의 전위를 고정하기 위한 전위 고정용 배선(24)을 형성한다.The potential fixing wiring 24 for fixing the potential of the channel region is formed so as to be in electrical contact with a predetermined region on the upper surface of the active region 4.

Description

반도체장치 및 그의 제조방법Semiconductor device and manufacturing method thereof

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 제1실시예에 의한 DRAM의 메모리셀 부분을 표시한 평면도,1 is a plan view showing a memory cell portion of a DRAM according to a first embodiment of the present invention;

제2도는 제1도에 표시한 제1실시예의 메모리셀 부분의 102-102선에 따른 단면도.FIG. 2 is a cross sectional view along line 102-102 of the portion of the memory cell of the first embodiment shown in FIG.

Claims (5)

절연층상에 형성되는 반도체장치에 있어서, 상기 절연층상에 형성된 활성영역을 포함하는 반도체층과, 상기 반도체층의 활성영역에 제1도전형의 채널영역을 규정하도록 소정의 간격을 구별하여 형성된 제1도전형의 1쌍의 소스/드레인 영역과, 상기 채널영역상에 형서된 게이트 전극과, 상기 한편의 소스/드레인 영역에 전기적으로 접촉된 비트선과, 상기 다른편의 소스/드레인 영역에 전기적으로 접촉된 커패시터와, 상기 활성영역의 상부표면상의 소정 영역에 전기적으로 접촉되어 상기 채널 영역의 전위를 고정하기 위한 전위 고정용 배선층과를 구비한 반도체장치.A semiconductor device formed on an insulating layer, comprising: a semiconductor layer including an active region formed on the insulating layer and a first gap formed by distinguishing a predetermined interval so as to define a channel region of a first conductivity type in an active region of the semiconductor layer A pair of conductive source / drain regions, a gate electrode formed on the channel region, a bit line in electrical contact with the one source / drain region, and an electrical contact with the other source / drain region And a capacitor, and a potential fixing wiring layer electrically contacting a predetermined region on an upper surface of the active region to fix the potential of the channel region. 제1항에 있어서, 상기 전위 고정용 배선층이 접속되는 영역은 상기 채널영역과 상기 한편이 소스/드레인 영역과의 양편에 인접하도록 상기 활성영역에 활성된 제1도 전형의 불순물 영역을 포함하는 반도체장치.The semiconductor device of claim 1, wherein the region to which the potential fixing wiring layer is connected comprises a first conductive type impurity region activated in the active region such that the channel region and the one side are adjacent to both sides of the source / drain region. Device. 제1항 또는 제2항의 어느 것에 있어서, 상기 반도체층의 활성영역은 평면적으로 봐서 +문자형상을 가지고 있는 반도체.The semiconductor according to any one of claims 1 to 3, wherein the active region of the semiconductor layer has a + character shape in plan view. 제1항 또는 제2항의 어느것에 있어서, 상기 반도체층의 활성영역은 평면적으로 봐서 능형형상을 가지고 있는 반도체장치.The semiconductor device according to claim 1, wherein the active region of the semiconductor layer has a ridge in plan view. 절연층상에 소정 형상을 가지는 활성영역을 포함하는 반도체층을 형성하는 공정과, 상기 활성영역상의 소정 영역에 게이트 전극을 형성하는 공정과, 상기 게이트 전극하에 제1도전형의 채널영역을 형성하도록 상기 활성영역에 소정의 간격을 구별하여 제2도전형의 1쌍의 소스/드레인 영역을 형성하는 공정과, 상기 활성영역에 상기 한편의 소스/드레인 영역과 상기 채널영역과에 인접하도록 제1도전형의 불순물 영역을 형성하는 공정과, 상기 한편의 소스/드레인 영역에 전기적으로 접촉하도록 비트선을 형성하는 공정과, 상기 불순물 영역의 상표면에 전기적으로 접촉하도록 상기 채널영역의 전위를 고정하기 위한 전위 고정용 배선층을 형성하는 공정과, 상기 다른편의 소스/드레인 영역에 전기적으로 접촉하도록 커패시터를 형성하는 공정과를 구비한 반도체장치의 제조방법.Forming a semiconductor layer including an active region having a predetermined shape on the insulating layer, forming a gate electrode in a predetermined region on the active region, and forming a first conductive channel region under the gate electrode; Forming a pair of source / drain regions of the second conductive type by distinguishing predetermined intervals from the active region; and forming a pair of source / drain regions of the second conductive type so as to be adjacent to the one source / drain region and the channel region in the active region. A step of forming an impurity region of the semiconductor layer, a step of forming a bit line in electrical contact with the one source / drain region, and a potential for fixing the potential of the channel region in electrical contact with the brand surface of the impurity region Forming a fixing wiring layer, and forming a capacitor in electrical contact with the other source / drain region. A method of manufacturing a semiconductor device. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950016071A 1994-08-29 1995-06-16 Semiconductor device and its fabrication method KR100200890B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-203228 1994-08-29
JP20322894A JP3316091B2 (en) 1994-08-29 1994-08-29 Semiconductor device

Publications (2)

Publication Number Publication Date
KR960009196A true KR960009196A (en) 1996-03-22
KR100200890B1 KR100200890B1 (en) 1999-06-15

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19929210C1 (en) 1999-06-25 2000-10-26 Infineon Technologies Ag Substrate used as a SOI substrate comprises a layer of monocrystalline silicon, a silicon dioxide layer and a silicon substrate

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JP3316091B2 (en) 2002-08-19
KR100200890B1 (en) 1999-06-15
JPH0870103A (en) 1996-03-12

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