KR960009036A - Substrate cleaning device equipped with exhaust means - Google Patents

Substrate cleaning device equipped with exhaust means Download PDF

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Publication number
KR960009036A
KR960009036A KR1019940020495A KR19940020495A KR960009036A KR 960009036 A KR960009036 A KR 960009036A KR 1019940020495 A KR1019940020495 A KR 1019940020495A KR 19940020495 A KR19940020495 A KR 19940020495A KR 960009036 A KR960009036 A KR 960009036A
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KR
South Korea
Prior art keywords
exhaust
conveying roller
nozzle unit
substrate
roller drive
Prior art date
Application number
KR1019940020495A
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Korean (ko)
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KR0133342B1 (en
Inventor
박민호
Original Assignee
이헌조
엘지전자 주식회사
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Priority to KR1019940020495A priority Critical patent/KR0133342B1/en
Publication of KR960009036A publication Critical patent/KR960009036A/en
Application granted granted Critical
Publication of KR0133342B1 publication Critical patent/KR0133342B1/en

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  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

본원 발명은 노즐유니트의 주위에 배기관을 장착함으로서 세정공정시 발생하는 미스트(mist : 미세한 물방울+먼지)의 재부착을 방지하여 세정효과를 높일 수 있도록 하는 배기수단이 장착된 기판 세정장치에 관한 것으로서, 상면과 하면이 소정의 경사를 이루고 있는 처리조와, 상기 처리조의 내부 중앙부에 설치되는 다수의 반송롤러구동축과, 상기 반송롤러구동축에 취부되어 세정대상이 되는 기판을 이송시키는 반송롤러와, 상기 처리조의 외부에 결착되어 상기 반송롤러구동축을 회전시키는 동력전달유니트와, 상기 반송롤러의 상,하측에 장착되는 동시에 다수의 노즐이 일정간격을 두고 마주보도록 설치되어 있는 상측 노즐유니트 및 하측 노즐유니트와, 상기 상측 노즐유니트의 주위에 장착되는 다수의 배기관과, 상기 배기관과 연통하여 외부의 배기장치와 연결되는 배기덕트로 구성되어, 세정공정시 발생하는 미스트를 외부로 용이하게 배출함으로서 미스트의 재부착을 방지하여 세정효과를 높일 수 있는 것을 특징으로 한다.The present invention relates to a substrate cleaning apparatus equipped with an exhaust means for preventing the reattachment of mist (fine water droplets + dust) generated during the cleaning process by mounting the exhaust pipe around the nozzle unit to increase the cleaning effect. A processing tank having an upper surface and a lower surface having a predetermined inclination, a plurality of conveying roller drive shafts provided in an inner central portion of the processing tank, a conveying roller for conveying a substrate attached to the conveying roller drive shaft to be cleaned; A power transmission unit which is fixed to the outside of the tank and rotates the conveying roller drive shaft, and an upper nozzle unit and a lower nozzle unit mounted on the upper and lower sides of the conveying roller and installed so that a plurality of nozzles face each other at a predetermined interval; A plurality of exhaust pipes mounted around the upper nozzle unit and in communication with the exhaust pipes It is composed of an exhaust duct connected to the exhaust device, it is characterized in that it is possible to easily discharge the mist generated during the cleaning process to the outside to prevent the reattachment of the mist to increase the cleaning effect.

Description

배기수단이 장착된 기판 세정장치Substrate cleaning device equipped with exhaust means

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도는 본원 발명에 의한 기판 세정장치의 정면도.3 is a front view of the substrate cleaning apparatus according to the present invention.

Claims (5)

상면과 하면이 소정의 경사를 이루고 있는 처리조와, 상기 처리조의 내부 중앙부에 설치되는 다수의 반송롤러구동축과, 상기 반송롤러구동축에 취부되어 세정대상이 되는 기판을 이송시키는 반송롤러와, 상기 처리조의 외부에 결착되어 상기 반송롤러구동축을 회전시키는 동력전달유니트와, 상기 반송롤러의 상, 하측에 장착되는 동시에 다수의 노즐이 일정간격을 두고 설치되어 있는 상측 노즐유니트 및 하측 노즐유니트와, 상기 상측 노즐유니트의 주위에 장착되는 다수의 배기관과, 상기 배기관과 연통하여 외부의 배기장치와 연결되는 배기덕트로 구성된 것을 특징으로 하는 배기수단이 장착된 기판 세정장치.A processing tank whose upper and lower surfaces have a predetermined inclination, a plurality of conveying roller drive shafts provided in an inner central portion of the treating tank, a conveying roller for conveying a substrate attached to the conveying roller drive shaft to be a cleaning object, and A power transmission unit which is fixed to the outside and rotates the conveying roller drive shaft, an upper nozzle unit and a lower nozzle unit which are mounted on the upper and lower sides of the conveying roller and provided with a plurality of nozzles at a predetermined interval, and the upper nozzle And a plurality of exhaust pipes mounted around the unit and an exhaust duct communicating with the exhaust pipe and connected to an external exhaust device. 제 1 항에 있어서, 상기의 배기관은 상기 상측 노즐유니트를 중심으로 좌, 우측의 상하에 위치하는 2층2열구조로 장착된 것을 특징으로 하는 배기수단이 장착된 기판 세정장치.2. The substrate cleaning apparatus according to claim 1, wherein the exhaust pipe is mounted in a two-layered two-row structure located above and below the left and right sides of the upper nozzle unit. 제 2 항에 있어서, 상기의 배기관은 길이방향으로 90도 방향과 180도 방향에, 또는 90도 방향과 360도 방향에 2개의 선형의 배기구가 형성되어 있는 것을 특징으로 하는 배기수단이 장착된 기판 세정장치.3. A substrate equipped with exhaust means according to claim 2, wherein said exhaust pipe has two linear exhaust ports formed in a 90 degree direction and a 180 degree direction in the longitudinal direction, or in a 90 degree direction and a 360 degree direction. Cleaning device. 제 2 항에 있어서, 상기의 배기관은 배기구가 배기덕트의 방향으로 갈수록 점차 축소하는 선형으로 형성된 것을 특징으로 하는 배기수단이 장착된 기판 세정장치.3. The apparatus of claim 2, wherein the exhaust pipe is formed in a linear shape in which the exhaust port is gradually reduced in the direction of the exhaust duct. 제 2 항에 있어서, 상기의 배기관은 길이방향으로 일정한 넓이를 갖는 선형의 배기구가 형성되고, 상기 배기구의 전면에 일정간격을 두고 호평의 판이 부착되어 형성되는 것을 특징으로 하는 배기수단이 장착된 기판 세정장치.According to claim 2, wherein the exhaust pipe is a substrate having an exhaust means, characterized in that the linear exhaust port is formed with a constant width in the longitudinal direction, the plate is formed on the front of the exhaust port with a predetermined interval is attached Cleaning device. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940020495A 1994-08-19 1994-08-19 Substrate cleaning apparatus having exhaust means KR0133342B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940020495A KR0133342B1 (en) 1994-08-19 1994-08-19 Substrate cleaning apparatus having exhaust means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940020495A KR0133342B1 (en) 1994-08-19 1994-08-19 Substrate cleaning apparatus having exhaust means

Publications (2)

Publication Number Publication Date
KR960009036A true KR960009036A (en) 1996-03-22
KR0133342B1 KR0133342B1 (en) 1998-04-16

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4495618B2 (en) * 2004-03-29 2010-07-07 芝浦メカトロニクス株式会社 Substrate processing apparatus and processing method

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