KR960009036A - Substrate cleaning device equipped with exhaust means - Google Patents
Substrate cleaning device equipped with exhaust means Download PDFInfo
- Publication number
- KR960009036A KR960009036A KR1019940020495A KR19940020495A KR960009036A KR 960009036 A KR960009036 A KR 960009036A KR 1019940020495 A KR1019940020495 A KR 1019940020495A KR 19940020495 A KR19940020495 A KR 19940020495A KR 960009036 A KR960009036 A KR 960009036A
- Authority
- KR
- South Korea
- Prior art keywords
- exhaust
- conveying roller
- nozzle unit
- substrate
- roller drive
- Prior art date
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
본원 발명은 노즐유니트의 주위에 배기관을 장착함으로서 세정공정시 발생하는 미스트(mist : 미세한 물방울+먼지)의 재부착을 방지하여 세정효과를 높일 수 있도록 하는 배기수단이 장착된 기판 세정장치에 관한 것으로서, 상면과 하면이 소정의 경사를 이루고 있는 처리조와, 상기 처리조의 내부 중앙부에 설치되는 다수의 반송롤러구동축과, 상기 반송롤러구동축에 취부되어 세정대상이 되는 기판을 이송시키는 반송롤러와, 상기 처리조의 외부에 결착되어 상기 반송롤러구동축을 회전시키는 동력전달유니트와, 상기 반송롤러의 상,하측에 장착되는 동시에 다수의 노즐이 일정간격을 두고 마주보도록 설치되어 있는 상측 노즐유니트 및 하측 노즐유니트와, 상기 상측 노즐유니트의 주위에 장착되는 다수의 배기관과, 상기 배기관과 연통하여 외부의 배기장치와 연결되는 배기덕트로 구성되어, 세정공정시 발생하는 미스트를 외부로 용이하게 배출함으로서 미스트의 재부착을 방지하여 세정효과를 높일 수 있는 것을 특징으로 한다.The present invention relates to a substrate cleaning apparatus equipped with an exhaust means for preventing the reattachment of mist (fine water droplets + dust) generated during the cleaning process by mounting the exhaust pipe around the nozzle unit to increase the cleaning effect. A processing tank having an upper surface and a lower surface having a predetermined inclination, a plurality of conveying roller drive shafts provided in an inner central portion of the processing tank, a conveying roller for conveying a substrate attached to the conveying roller drive shaft to be cleaned; A power transmission unit which is fixed to the outside of the tank and rotates the conveying roller drive shaft, and an upper nozzle unit and a lower nozzle unit mounted on the upper and lower sides of the conveying roller and installed so that a plurality of nozzles face each other at a predetermined interval; A plurality of exhaust pipes mounted around the upper nozzle unit and in communication with the exhaust pipes It is composed of an exhaust duct connected to the exhaust device, it is characterized in that it is possible to easily discharge the mist generated during the cleaning process to the outside to prevent the reattachment of the mist to increase the cleaning effect.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제3도는 본원 발명에 의한 기판 세정장치의 정면도.3 is a front view of the substrate cleaning apparatus according to the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940020495A KR0133342B1 (en) | 1994-08-19 | 1994-08-19 | Substrate cleaning apparatus having exhaust means |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940020495A KR0133342B1 (en) | 1994-08-19 | 1994-08-19 | Substrate cleaning apparatus having exhaust means |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960009036A true KR960009036A (en) | 1996-03-22 |
KR0133342B1 KR0133342B1 (en) | 1998-04-16 |
Family
ID=19390714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940020495A KR0133342B1 (en) | 1994-08-19 | 1994-08-19 | Substrate cleaning apparatus having exhaust means |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0133342B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4495618B2 (en) * | 2004-03-29 | 2010-07-07 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus and processing method |
-
1994
- 1994-08-19 KR KR1019940020495A patent/KR0133342B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0133342B1 (en) | 1998-04-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4987352B2 (en) | Substrate transfer device | |
US4475259A (en) | Ultrasonic cleaning apparatus | |
KR940003588A (en) | Continuous filtration device | |
WO2009060413A3 (en) | An automobile vehicle with a wiperless cleaning system for glazed surfaces and the like | |
KR20140063420A (en) | Dust collector | |
JP2009148699A (en) | Substrate treatment device | |
KR970064237A (en) | Dust removal device for camera housing using airflow | |
JP4647378B2 (en) | Drying equipment | |
CN109373743B (en) | Air knife and drying device adopting same | |
KR960009036A (en) | Substrate cleaning device equipped with exhaust means | |
JP2003243811A (en) | Spraying device for printed circuit board | |
US6018842A (en) | Glass washing machine | |
FI20002166A (en) | Apparatus for cutting especially a paper web with water jet | |
KR200443051Y1 (en) | Air-knife for drying substrate | |
JP4509613B2 (en) | Substrate processing equipment | |
DE59800373D1 (en) | Cleaning device for a cylinder or roller of a printing machine | |
JP3727162B2 (en) | Adherent removal device | |
JPH02271590A (en) | Apparatus for brush-washing of printed wiring board | |
JPH11253897A (en) | Dust removing device | |
JP2005187213A (en) | Substrate processing system | |
DE59902452D1 (en) | Device and method for cleaning parts of printing machines | |
JPH0241633Y2 (en) | ||
ATE170048T1 (en) | BEET WASHING MACHINE | |
CN217451378U (en) | Fluid cleaning structure for cover plate glass | |
SE9802656D0 (en) | Method and apparatus for removing grease or other liquid substances during bowel cleansing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |