KR960008556B1 - Contact forming method - Google Patents

Contact forming method Download PDF

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Publication number
KR960008556B1
KR960008556B1 KR93007494A KR930007494A KR960008556B1 KR 960008556 B1 KR960008556 B1 KR 960008556B1 KR 93007494 A KR93007494 A KR 93007494A KR 930007494 A KR930007494 A KR 930007494A KR 960008556 B1 KR960008556 B1 KR 960008556B1
Authority
KR
South Korea
Prior art keywords
forming
depositing
metal
thin film
forming method
Prior art date
Application number
KR93007494A
Other languages
Korean (ko)
Inventor
Kyung-Soo Cho
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Priority to KR93007494A priority Critical patent/KR960008556B1/en
Application granted granted Critical
Publication of KR960008556B1 publication Critical patent/KR960008556B1/en

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

forming a contact hole by etching an oxide (3) film after forming a junction part (2) and depositing the oxide film (3) on the silicon substrate (1); forming a metal oxide layer (6) after forming Ti (4) and metal thin film (5) for diffusion protection; forming a metal thin film (10) by depositing fire-proof metal after depositing and annealing a metal thin film (7), and depositing an alumina alloy (9) on a metal oxide layer (8).
KR93007494A 1993-04-30 1993-04-30 Contact forming method KR960008556B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93007494A KR960008556B1 (en) 1993-04-30 1993-04-30 Contact forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93007494A KR960008556B1 (en) 1993-04-30 1993-04-30 Contact forming method

Publications (1)

Publication Number Publication Date
KR960008556B1 true KR960008556B1 (en) 1996-06-28

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ID=19354799

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93007494A KR960008556B1 (en) 1993-04-30 1993-04-30 Contact forming method

Country Status (1)

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KR (1) KR960008556B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6955983B2 (en) 2002-05-30 2005-10-18 Samsung Electronics Co., Ltd. Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6955983B2 (en) 2002-05-30 2005-10-18 Samsung Electronics Co., Ltd. Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer

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