KR960003124U - Wafer Carrier and Carrier Handler Fastening Structure - Google Patents

Wafer Carrier and Carrier Handler Fastening Structure

Info

Publication number
KR960003124U
KR960003124U KR2019940013906U KR19940013906U KR960003124U KR 960003124 U KR960003124 U KR 960003124U KR 2019940013906 U KR2019940013906 U KR 2019940013906U KR 19940013906 U KR19940013906 U KR 19940013906U KR 960003124 U KR960003124 U KR 960003124U
Authority
KR
South Korea
Prior art keywords
carrier
fastening structure
handler
wafer
wafer carrier
Prior art date
Application number
KR2019940013906U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940013906U priority Critical patent/KR960003124U/en
Publication of KR960003124U publication Critical patent/KR960003124U/en

Links

KR2019940013906U 1994-06-15 1994-06-15 Wafer Carrier and Carrier Handler Fastening Structure KR960003124U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013906U KR960003124U (en) 1994-06-15 1994-06-15 Wafer Carrier and Carrier Handler Fastening Structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013906U KR960003124U (en) 1994-06-15 1994-06-15 Wafer Carrier and Carrier Handler Fastening Structure

Publications (1)

Publication Number Publication Date
KR960003124U true KR960003124U (en) 1996-01-22

Family

ID=60667268

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013906U KR960003124U (en) 1994-06-15 1994-06-15 Wafer Carrier and Carrier Handler Fastening Structure

Country Status (1)

Country Link
KR (1) KR960003124U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100227849B1 (en) * 1996-07-26 1999-11-01 윤종용 Wafer cassettle for preventing falling

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100227849B1 (en) * 1996-07-26 1999-11-01 윤종용 Wafer cassettle for preventing falling

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application