KR960003060U - Cooling Wall Chemical Reactor - Google Patents

Cooling Wall Chemical Reactor

Info

Publication number
KR960003060U
KR960003060U KR2019940014532U KR19940014532U KR960003060U KR 960003060 U KR960003060 U KR 960003060U KR 2019940014532 U KR2019940014532 U KR 2019940014532U KR 19940014532 U KR19940014532 U KR 19940014532U KR 960003060 U KR960003060 U KR 960003060U
Authority
KR
South Korea
Prior art keywords
cooling wall
chemical reactor
wall chemical
reactor
cooling
Prior art date
Application number
KR2019940014532U
Other languages
Korean (ko)
Other versions
KR200169679Y1 (en
Inventor
김중권
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940014532U priority Critical patent/KR200169679Y1/en
Publication of KR960003060U publication Critical patent/KR960003060U/en
Application granted granted Critical
Publication of KR200169679Y1 publication Critical patent/KR200169679Y1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45512—Premixing before introduction in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4411—Cooling of the reaction chamber walls
KR2019940014532U 1994-06-21 1994-06-21 Cooling wall chemical reaction apparatus KR200169679Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940014532U KR200169679Y1 (en) 1994-06-21 1994-06-21 Cooling wall chemical reaction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940014532U KR200169679Y1 (en) 1994-06-21 1994-06-21 Cooling wall chemical reaction apparatus

Publications (2)

Publication Number Publication Date
KR960003060U true KR960003060U (en) 1996-01-22
KR200169679Y1 KR200169679Y1 (en) 2000-02-01

Family

ID=19386168

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940014532U KR200169679Y1 (en) 1994-06-21 1994-06-21 Cooling wall chemical reaction apparatus

Country Status (1)

Country Link
KR (1) KR200169679Y1 (en)

Also Published As

Publication number Publication date
KR200169679Y1 (en) 2000-02-01

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