KR950034361U - 압력계포트의막힘방지를위한가스배출관 - Google Patents

압력계포트의막힘방지를위한가스배출관

Info

Publication number
KR950034361U
KR950034361U KR2019940012326U KR19940012326U KR950034361U KR 950034361 U KR950034361 U KR 950034361U KR 2019940012326 U KR2019940012326 U KR 2019940012326U KR 19940012326 U KR19940012326 U KR 19940012326U KR 950034361 U KR950034361 U KR 950034361U
Authority
KR
South Korea
Prior art keywords
outlet pipe
gas outlet
pressure gauge
prevent clogging
gauge port
Prior art date
Application number
KR2019940012326U
Other languages
English (en)
Other versions
KR200176969Y1 (ko
Inventor
황두환
유순포
문현명
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940012326U priority Critical patent/KR200176969Y1/ko
Publication of KR950034361U publication Critical patent/KR950034361U/ko
Application granted granted Critical
Publication of KR200176969Y1 publication Critical patent/KR200176969Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
KR2019940012326U 1994-05-30 1994-05-30 압력계포트의막힘방지를위한가스배출관 KR200176969Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940012326U KR200176969Y1 (ko) 1994-05-30 1994-05-30 압력계포트의막힘방지를위한가스배출관

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940012326U KR200176969Y1 (ko) 1994-05-30 1994-05-30 압력계포트의막힘방지를위한가스배출관

Publications (2)

Publication Number Publication Date
KR950034361U true KR950034361U (ko) 1995-12-18
KR200176969Y1 KR200176969Y1 (ko) 2000-04-15

Family

ID=19384472

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940012326U KR200176969Y1 (ko) 1994-05-30 1994-05-30 압력계포트의막힘방지를위한가스배출관

Country Status (1)

Country Link
KR (1) KR200176969Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020046392A (ko) * 2000-12-13 2002-06-21 박신하 비접촉 자계센서를 이용한 브라운관의 하울링 측정장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020046392A (ko) * 2000-12-13 2002-06-21 박신하 비접촉 자계센서를 이용한 브라운관의 하울링 측정장치

Also Published As

Publication number Publication date
KR200176969Y1 (ko) 2000-04-15

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Legal Events

Date Code Title Description
A201 Request for examination
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E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20041220

Year of fee payment: 6

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