KR950033441A - Non-contact height measuring device using laser - Google Patents

Non-contact height measuring device using laser Download PDF

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Publication number
KR950033441A
KR950033441A KR1019940012154A KR19940012154A KR950033441A KR 950033441 A KR950033441 A KR 950033441A KR 1019940012154 A KR1019940012154 A KR 1019940012154A KR 19940012154 A KR19940012154 A KR 19940012154A KR 950033441 A KR950033441 A KR 950033441A
Authority
KR
South Korea
Prior art keywords
laser
contact height
height measuring
measurement
measuring device
Prior art date
Application number
KR1019940012154A
Other languages
Korean (ko)
Other versions
KR0138313B1 (en
Inventor
전병환
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019940012154A priority Critical patent/KR0138313B1/en
Publication of KR950033441A publication Critical patent/KR950033441A/en
Application granted granted Critical
Publication of KR0138313B1 publication Critical patent/KR0138313B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Abstract

본 발명은 레이저를 이용한 비접촉식 높이 측정장치에 관한 것으로, 특시 수 ㎛에서 수십㎛까지의 고해상도 측정과 동시에 고속 측정을 가능하게 하는 복수개의 CCD(charge coupled device) 촬상 소자를 사용한 카메라와 광원으로 레이저 스트라이프(stripe)를 사용하는 비접촉식 높이 측정장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact height measuring apparatus using a laser, and includes a laser stripe with a camera and a light source using a plurality of CCD (charge coupled device) imaging devices that enable high-speed measurement at the same time as high resolution of several micrometers to several tens of micrometers. A non-contact height measuring device using a stripe.

즉, 본 발명에 따른 레이저를 이용한 비접촉식 높이 측정장치는 조명 장치를 부착한 한 대의 CCD 카메라를 구비하여 측정 대상 물체의 위치를 인식할 수 있도록 하고, 레이저의 광을 스트라이프형으로 하여 4개 이상의 CCD 촬상 소자로 구성된 다 CCD 카메라로 여러개의 레이저 영상을 고속으로 촬상하여 거리를 측정함으로써, 높이 측정 속도를 획기적으로 향상시킴과 동시에 고해상도의 측정이 가능하며, 현재 측정되고 있는 물체의 부위를 인식하면서 측정할 수 있다는 장점이 있다.That is, the non-contact height measuring apparatus using the laser according to the present invention includes a single CCD camera with an illumination device to recognize the position of the object to be measured, and uses four or more CCDs as the laser light is striped. The multi-CCD camera, which captures several laser images at high speed and measures the distance, greatly improves the height measurement speed and enables high-resolution measurement. The advantage is that you can.

Description

레이저를 이용한 비접촉식 높이 측정장치Non-contact height measuring device using laser

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도는 본 발명에 따른 레이저를 이용한 높이 측정장치에 있어서의 레이저 반사광 감지를 위한 멀티 CCD 카메라 및 CCD 카메라의 배치도, 제4도는 제3도와 같은 멀티 CCD 카메라 배치에 의한 광경로에 따른 높이 측정법을 설명하기 위한 설명도.FIG. 3 is a layout view of a multi-CCD camera and a CCD camera for detecting the laser reflected light in the height measuring apparatus using the laser according to the present invention. FIG. 4 is a height measuring method according to the optical path by the multi-CCD camera arrangement as shown in FIG. Explanatory drawing for explanation.

Claims (2)

광원과, 상기 광원으로부터의 광을 스트라이프형의 광으로 만들어주는 광학계와, 상기 광학계를 통과한 스트라이프형의 광이 측정 대상 물체의 표면에서 반사되어 오는 반사광을 감지하여 주며, 상기 광원과는 상기 측정 대상 물체의 측정면의 법선으로부터 반대쪽으로 동일 각도 경사지게 배치된 다중 CCD 촬상 소자와, 그리고 상기 측정 대상 물체의 부위를 측정 실시전 사전 인식하기 위한 보조 CCD 촬상 소자를 구비하여 된 것을 특징으로 하는 비접촉식 높이 측정장치.A light source, an optical system for converting light from the light source into stripe-shaped light, and a stripe-type light passing through the optical system to sense reflected light reflected from a surface of an object to be measured, and the light source Non-contact height, characterized in that it comprises a multi-CCD image pickup device disposed at an angle inclined opposite to the normal of the measurement surface of the target object, and an auxiliary CCD image pickup device for pre-recognizing a portion of the measurement target object before measurement is performed. Measuring device. 제1항에 있어서, 다중 CCD 촬상 소자는 4개 이상의 복수개의 CCD 소자를 구비하여 된 것을 특징으로 하는 비접촉식 높이 측정장치.The non-contact height measuring device according to claim 1, wherein the multiple CCD image pickup device comprises four or more CCD elements. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940012154A 1994-05-31 1994-05-31 Height measuring apparatus of no-touching using laser KR0138313B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940012154A KR0138313B1 (en) 1994-05-31 1994-05-31 Height measuring apparatus of no-touching using laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940012154A KR0138313B1 (en) 1994-05-31 1994-05-31 Height measuring apparatus of no-touching using laser

Publications (2)

Publication Number Publication Date
KR950033441A true KR950033441A (en) 1995-12-26
KR0138313B1 KR0138313B1 (en) 1998-05-15

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Application Number Title Priority Date Filing Date
KR1019940012154A KR0138313B1 (en) 1994-05-31 1994-05-31 Height measuring apparatus of no-touching using laser

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KR (1) KR0138313B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101367663B1 (en) * 2006-12-08 2014-02-27 엘아이지에이디피 주식회사 apparatus for attaching substrates of flat plate display element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100948406B1 (en) * 2007-11-13 2010-03-19 성균관대학교산학협력단 Chicken carcass quality grade automatic decision and weight measuring system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101367663B1 (en) * 2006-12-08 2014-02-27 엘아이지에이디피 주식회사 apparatus for attaching substrates of flat plate display element

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Publication number Publication date
KR0138313B1 (en) 1998-05-15

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