KR950028648U - 전자공명 플라즈마 발생장치 - Google Patents

전자공명 플라즈마 발생장치

Info

Publication number
KR950028648U
KR950028648U KR2019940005406U KR19940005406U KR950028648U KR 950028648 U KR950028648 U KR 950028648U KR 2019940005406 U KR2019940005406 U KR 2019940005406U KR 19940005406 U KR19940005406 U KR 19940005406U KR 950028648 U KR950028648 U KR 950028648U
Authority
KR
South Korea
Prior art keywords
plasma generator
electromagnetic resonance
resonance plasma
electromagnetic
generator
Prior art date
Application number
KR2019940005406U
Other languages
English (en)
Other versions
KR970003602Y1 (ko
Inventor
성노영
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940005406U priority Critical patent/KR970003602Y1/ko
Publication of KR950028648U publication Critical patent/KR950028648U/ko
Application granted granted Critical
Publication of KR970003602Y1 publication Critical patent/KR970003602Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
KR2019940005406U 1994-03-17 1994-03-17 전자공명 플라즈마 발생장치 KR970003602Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940005406U KR970003602Y1 (ko) 1994-03-17 1994-03-17 전자공명 플라즈마 발생장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940005406U KR970003602Y1 (ko) 1994-03-17 1994-03-17 전자공명 플라즈마 발생장치

Publications (2)

Publication Number Publication Date
KR950028648U true KR950028648U (ko) 1995-10-20
KR970003602Y1 KR970003602Y1 (ko) 1997-04-18

Family

ID=19379126

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940005406U KR970003602Y1 (ko) 1994-03-17 1994-03-17 전자공명 플라즈마 발생장치

Country Status (1)

Country Link
KR (1) KR970003602Y1 (ko)

Also Published As

Publication number Publication date
KR970003602Y1 (ko) 1997-04-18

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Legal Events

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E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20080619

Year of fee payment: 12

EXPY Expiration of term