KR950028647U - Prefabricated Yoondae Lighting Equipment - Google Patents

Prefabricated Yoondae Lighting Equipment

Info

Publication number
KR950028647U
KR950028647U KR2019940005793U KR19940005793U KR950028647U KR 950028647 U KR950028647 U KR 950028647U KR 2019940005793 U KR2019940005793 U KR 2019940005793U KR 19940005793 U KR19940005793 U KR 19940005793U KR 950028647 U KR950028647 U KR 950028647U
Authority
KR
South Korea
Prior art keywords
yoondae
prefabricated
lighting equipment
lighting
equipment
Prior art date
Application number
KR2019940005793U
Other languages
Korean (ko)
Other versions
KR970007070Y1 (en
Inventor
배상만
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940005793U priority Critical patent/KR970007070Y1/en
Publication of KR950028647U publication Critical patent/KR950028647U/en
Application granted granted Critical
Publication of KR970007070Y1 publication Critical patent/KR970007070Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
KR2019940005793U 1994-03-22 1994-03-22 Prefabricated illumination apparatus in photolithography KR970007070Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940005793U KR970007070Y1 (en) 1994-03-22 1994-03-22 Prefabricated illumination apparatus in photolithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940005793U KR970007070Y1 (en) 1994-03-22 1994-03-22 Prefabricated illumination apparatus in photolithography

Publications (2)

Publication Number Publication Date
KR950028647U true KR950028647U (en) 1995-10-20
KR970007070Y1 KR970007070Y1 (en) 1997-07-15

Family

ID=19379416

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940005793U KR970007070Y1 (en) 1994-03-22 1994-03-22 Prefabricated illumination apparatus in photolithography

Country Status (1)

Country Link
KR (1) KR970007070Y1 (en)

Also Published As

Publication number Publication date
KR970007070Y1 (en) 1997-07-15

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Legal Events

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Payment date: 20081006

Year of fee payment: 12

EXPY Expiration of term