KR950028638U - 고온 이온주입장치 - Google Patents

고온 이온주입장치

Info

Publication number
KR950028638U
KR950028638U KR2019940005802U KR19940005802U KR950028638U KR 950028638 U KR950028638 U KR 950028638U KR 2019940005802 U KR2019940005802 U KR 2019940005802U KR 19940005802 U KR19940005802 U KR 19940005802U KR 950028638 U KR950028638 U KR 950028638U
Authority
KR
South Korea
Prior art keywords
high temperature
injection device
ion injection
temperature ion
temperature
Prior art date
Application number
KR2019940005802U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940005802U priority Critical patent/KR950028638U/ko
Publication of KR950028638U publication Critical patent/KR950028638U/ko

Links

KR2019940005802U 1994-03-22 1994-03-22 고온 이온주입장치 KR950028638U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940005802U KR950028638U (ko) 1994-03-22 1994-03-22 고온 이온주입장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940005802U KR950028638U (ko) 1994-03-22 1994-03-22 고온 이온주입장치

Publications (1)

Publication Number Publication Date
KR950028638U true KR950028638U (ko) 1995-10-20

Family

ID=60883180

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940005802U KR950028638U (ko) 1994-03-22 1994-03-22 고온 이온주입장치

Country Status (1)

Country Link
KR (1) KR950028638U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination