KR950021445U - Atmospheric pressure wafer transfer device - Google Patents

Atmospheric pressure wafer transfer device

Info

Publication number
KR950021445U
KR950021445U KR2019930026687U KR930026687U KR950021445U KR 950021445 U KR950021445 U KR 950021445U KR 2019930026687 U KR2019930026687 U KR 2019930026687U KR 930026687 U KR930026687 U KR 930026687U KR 950021445 U KR950021445 U KR 950021445U
Authority
KR
South Korea
Prior art keywords
atmospheric pressure
transfer device
wafer transfer
pressure wafer
atmospheric
Prior art date
Application number
KR2019930026687U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930026687U priority Critical patent/KR950021445U/en
Publication of KR950021445U publication Critical patent/KR950021445U/en

Links

KR2019930026687U 1993-12-07 1993-12-07 Atmospheric pressure wafer transfer device KR950021445U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930026687U KR950021445U (en) 1993-12-07 1993-12-07 Atmospheric pressure wafer transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930026687U KR950021445U (en) 1993-12-07 1993-12-07 Atmospheric pressure wafer transfer device

Publications (1)

Publication Number Publication Date
KR950021445U true KR950021445U (en) 1995-07-28

Family

ID=60919423

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930026687U KR950021445U (en) 1993-12-07 1993-12-07 Atmospheric pressure wafer transfer device

Country Status (1)

Country Link
KR (1) KR950021445U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination