KR950021399U - Pecvd 장치 - Google Patents

Pecvd 장치

Info

Publication number
KR950021399U
KR950021399U KR2019930030457U KR930030457U KR950021399U KR 950021399 U KR950021399 U KR 950021399U KR 2019930030457 U KR2019930030457 U KR 2019930030457U KR 930030457 U KR930030457 U KR 930030457U KR 950021399 U KR950021399 U KR 950021399U
Authority
KR
South Korea
Prior art keywords
pecvd equipment
pecvd
equipment
Prior art date
Application number
KR2019930030457U
Other languages
English (en)
Other versions
KR970001341Y1 (ko
Inventor
김래성
강명구
강중구
김남준
조규석
유순재
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019930030457U priority Critical patent/KR970001341Y1/ko
Publication of KR950021399U publication Critical patent/KR950021399U/ko
Application granted granted Critical
Publication of KR970001341Y1 publication Critical patent/KR970001341Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR2019930030457U 1993-12-29 1993-12-29 Pecvd 장치 KR970001341Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930030457U KR970001341Y1 (ko) 1993-12-29 1993-12-29 Pecvd 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930030457U KR970001341Y1 (ko) 1993-12-29 1993-12-29 Pecvd 장치

Publications (2)

Publication Number Publication Date
KR950021399U true KR950021399U (ko) 1995-07-28
KR970001341Y1 KR970001341Y1 (ko) 1997-02-22

Family

ID=19373465

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930030457U KR970001341Y1 (ko) 1993-12-29 1993-12-29 Pecvd 장치

Country Status (1)

Country Link
KR (1) KR970001341Y1 (ko)

Also Published As

Publication number Publication date
KR970001341Y1 (ko) 1997-02-22

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Legal Events

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