KR950019775A - Evaluation Method of Lens Characteristics of Reduced Exposure Equipment - Google Patents
Evaluation Method of Lens Characteristics of Reduced Exposure Equipment Download PDFInfo
- Publication number
- KR950019775A KR950019775A KR1019930031840A KR930031840A KR950019775A KR 950019775 A KR950019775 A KR 950019775A KR 1019930031840 A KR1019930031840 A KR 1019930031840A KR 930031840 A KR930031840 A KR 930031840A KR 950019775 A KR950019775 A KR 950019775A
- Authority
- KR
- South Korea
- Prior art keywords
- photosensitive film
- lens characteristics
- reduced exposure
- evaluating
- exposure apparatus
- Prior art date
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본 발명은 축소노광 장치의 렌즈 특성 평가방법에 관한 것으로 감광막 패턴을 가로축 n개 세로축 m개의 블럭을 한 다이 내에 형성하여 CD(critical dimension)를 측정함으로써 필드전체의 이상 유무를 확인할 수 있으며 렌즈 가공 상태를 점검하는 방법에 관한 것이다.The present invention relates to a method for evaluating lens characteristics of a reduced exposure apparatus. The photosensitive film pattern is formed in one die with n horizontal axes and m vertical axes in one die to measure the CD (critical dimension) to check whether there is an abnormality of the entire field and the lens processing state. It is about how to check.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제3도는 본 발명에 의한 렌즈 특성 평가를 위한 패턴을 도시한 평면도.3 is a plan view showing a pattern for lens characteristic evaluation according to the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930031840A KR950019775A (en) | 1993-12-31 | 1993-12-31 | Evaluation Method of Lens Characteristics of Reduced Exposure Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930031840A KR950019775A (en) | 1993-12-31 | 1993-12-31 | Evaluation Method of Lens Characteristics of Reduced Exposure Equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950019775A true KR950019775A (en) | 1995-07-24 |
Family
ID=66853800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930031840A KR950019775A (en) | 1993-12-31 | 1993-12-31 | Evaluation Method of Lens Characteristics of Reduced Exposure Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950019775A (en) |
-
1993
- 1993-12-31 KR KR1019930031840A patent/KR950019775A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |