KR950013237A - Light Path Control - Google Patents

Light Path Control Download PDF

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Publication number
KR950013237A
KR950013237A KR1019930022798A KR930022798A KR950013237A KR 950013237 A KR950013237 A KR 950013237A KR 1019930022798 A KR1019930022798 A KR 1019930022798A KR 930022798 A KR930022798 A KR 930022798A KR 950013237 A KR950013237 A KR 950013237A
Authority
KR
South Korea
Prior art keywords
optical path
control device
path control
electrode
deformation
Prior art date
Application number
KR1019930022798A
Other languages
Korean (ko)
Other versions
KR970006685B1 (en
Inventor
지정범
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR1019930022798A priority Critical patent/KR970006685B1/en
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to CN94193967A priority patent/CN1047056C/en
Priority to JP51252995A priority patent/JP3283881B2/en
Priority to RU96110182/09A priority patent/RU2140722C1/en
Priority to CZ19961180A priority patent/CZ288846B6/en
Priority to HU9601094A priority patent/HU220516B1/en
Priority to AU80052/94A priority patent/AU693119B2/en
Priority to PCT/KR1994/000148 priority patent/WO1995012287A1/en
Priority to BR9407923A priority patent/BR9407923A/en
Priority to PL94314124A priority patent/PL176406B1/en
Priority to CA002175198A priority patent/CA2175198A1/en
Priority to MYPI94002871A priority patent/MY113977A/en
Priority to ES94117124T priority patent/ES2140490T3/en
Priority to EP94117124A priority patent/EP0651274B1/en
Priority to DE69420666T priority patent/DE69420666T2/en
Priority to US08/331,399 priority patent/US5661611A/en
Priority to TW083110157A priority patent/TW279930B/zh
Publication of KR950013237A publication Critical patent/KR950013237A/en
Application granted granted Critical
Publication of KR970006685B1 publication Critical patent/KR970006685B1/en
Priority to US08/877,084 priority patent/US5900998A/en
Priority to US08/877,645 priority patent/US5936757A/en

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor

Abstract

본 발명은 광로조절장치에 관한 것으로, 침적등의 방법으로 형성된 박막의 압전 또는 전왜세라믹으로 이루어진 액츄에이터의 변형부 일측표면에 전극을 개재시켜 절연물질로 이루어진 탄성부가 형성되어 지지부에 의해 구동기판에 실장되며 인가되는 화상신호에 의해 변형부가 수평방향으로 수축된다. 그러므로, 변형부와 탄성부는 계면에 전단응력이 발생되어 변형부쪽으로 휘어져 경사지게 되므로 액츄에이터의 상부에 부착되어 형성된 거울이 동일하게 경사지게 된다. 따라서, 변형부를 침적동의 방법에 의해 형성된 박막의 세라믹으로 쉽게 형성할 수 있으며, 변형부가 압전세라믹으로 형성된 박막의 세라믹으로 쉽게 형성할 수 있으며, 변형부가 압전 세라믹으로 형성되어도 별도의 분극을 하지않아도 되고, 액츄에이터가 전도성 접착제를 이용하지 않고 박막공정에 의해 구동기판에 실장되므로 이웃하는 액츄에이터들사이가 전기적으로 단락되는 것을 방지하며, 그리고, 거울이 액츄에이터의 상부 표면에 부착되어 형성되므로 시간의 경과에 따른 동작 특성의 열화를 방지하며, 또한, 변형부들이 분리되므로 상호간섭의 발생을 방지한다.The present invention relates to an optical path control device, wherein an elastic part made of an insulating material is formed on one surface of a deformable part of an actuator made of a piezoelectric or electro-distorter thin film formed by a deposition method, and is mounted on a driving substrate by a support part. The deformable portion is contracted in the horizontal direction by the applied image signal. Therefore, the deformation part and the elastic part are inclined to be deformed toward the deformation part by the shear stress is generated at the interface, the mirror formed attached to the upper portion of the actuator is inclined equally. Therefore, the deformation part can be easily formed from thin film ceramic formed by the method of immersion copper, the deformation part can be easily formed from thin film ceramic formed by piezoceramic, and the deformation part is formed of piezoelectric ceramic, and no separate polarization is required. Since the actuator is mounted on the driving substrate by a thin film process without using a conductive adhesive, it prevents an electrical short between the adjacent actuators, and the mirror is formed by being attached to the upper surface of the actuator. It prevents the deterioration of the operating characteristics and also prevents the occurrence of mutual interference since the deformation parts are separated.

Description

광로조절장치Light Path Control

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 종래의 광로조절장치의 단면도.1 is a cross-sectional view of a conventional optical path control device.

제2도는 제1도의 광로조절장치의 동작을 설명하는 개략도.2 is a schematic view for explaining the operation of the optical path control device of FIG.

제3도는 본 발명의 실시예에 따른 광조조절장치의 단면도.Figure 3 is a cross-sectional view of the light adjustment device according to an embodiment of the present invention.

제4도는 제3도의 광로조절장치의 동작을 설명하는 개략도.4 is a schematic view for explaining the operation of the optical path control device of FIG.

제5도는 본 발명의 다른 실시예에 따른 광로조절장치의 설명도.5 is an explanatory diagram of an optical path control apparatus according to another embodiment of the present invention.

Claims (17)

트랜지스터들이 내장되고 표면에 이 트랜지스터들과 전기적으로 연결된 접속단자들을 갖는 구동기판과, 상기 구동기판에 일측의 하부표면이 지지부에 부착되어 실장되고, 박막의 세라믹으로 이루어지며 양측 표면에 제1 및 제2전극이 형성된 변형부와, 상기 제1 또는 제2전극이 표면에 형성된 탄성부와, 상기 제1전극과 접속단자를 전기적으로 연결하는 플러그로 이루어져 화상신호를 인가할 때 상기 변형부가 수평축으로 축소되는 것에 의해 상기 지지부에 부착되지 않는 타측이 상기 변형부쪽으로 휘는 액츄에이터와, 상기 액츄에이터의 표면에 부착된 거울을 구비하는 광로조절장치.A drive substrate having transistors embedded therein and having connection terminals electrically connected to the transistors; and a lower surface of one side attached to the support portion is mounted on the support substrate, and is made of a thin film of ceramic, the first and second surfaces of which are The deformable part having the two electrodes, the elastic part formed on the surface of the first or second electrode, and the plug electrically connecting the first electrode and the connecting terminal to reduce the horizontal deformation of the deformable part when the image signal is applied. And an actuator in which the other side not attached to the support portion is bent toward the deformation portion, and a mirror attached to the surface of the actuator. 제1항에 있어서, 상기 변형부가 전왜 또는 분극되지 않은 압전 세라믹으로 이루어진 광로조절장치.The optical path control device according to claim 1, wherein the deformable portion is made of piezoelectric ceramic that is not warped or polarized. 제2항에 있어서, 상기 변형부가 Sol-Gel법, 스퍼텅링 또는 화학 기상침적법으로 형성된 광로조절장치.The optical path control device according to claim 2, wherein the deformation part is formed by a Sol-Gel method, a sputtering method, or a chemical vapor deposition method. 제3항에 있어서, 상기 변형부가 0.7∼2㎛ 정도의 두께로 형성된 광로조절장치.The optical path control device according to claim 3, wherein the deformation part has a thickness of about 0.7 to 2 µm. 제1항에 있어서, 상기 지지부가 질화물 또는 산화물 등의 절연물질로 이루어진 광로조절장치.The optical path control device according to claim 1, wherein the support part is made of an insulating material such as nitride or oxide. 제5항에 있어서, 상기 지지부가 스퍼터링 또는 화학기상침적법으로 형성된 광로조절장치.The optical path control device according to claim 5, wherein the support portion is formed by sputtering or chemical vapor deposition. 제6항에 있어서, 상기 지지부가 0.7∼2㎛정도의 두께로 형성된 광로조절장치.The optical path adjusting device according to claim 6, wherein the support part has a thickness of about 0.7 to 2 µm. 제1항에 있어서, 상기 탄성부가 질화물 또는 산화물로 형성된 광로조절장치.The optical path control device according to claim 1, wherein the elastic part is formed of nitride or oxide. 제8항에 있어서, 상기 탄성부가 스퍼터링 또는 화학기상침적법으로 형성된 광로조절장치.The optical path control device according to claim 8, wherein the elastic part is formed by sputtering or chemical vapor deposition. 제9항에 있어서, 상기 탄성부가 0.7∼2㎛ 정도의 두께로 형성된 광로조절장치.The optical path control device according to claim 9, wherein the elastic portion has a thickness of about 0.7 to 2 µm. 제10항에 있어서, 상기 탄성부가 제1전극의 하부에 형성된 광로조절장치.The optical path adjusting device of claim 10, wherein the elastic part is formed under the first electrode. 제10항에 있어서, 상기 탄성부가 제2전극과 거울 사이에 형성된 광로조절장치.The optical path adjusting device of claim 10, wherein the elastic part is formed between the second electrode and the mirror. 제1항에 있어서, 상기 플러그가 텅스턴 또는 티타늄으로 형성된 광로조절장치.The optical path control device according to claim 1, wherein the plug is formed of tungsten or titanium. 제1항에 있어서, 상기 제1전극이 상기 플러그와 연결된 광로조절장치.The optical path control device of claim 1, wherein the first electrode is connected to the plug. 제14항에 있어서, 상기 제1전극이 백금 또는 백금/티타늄으로 형성된 광로조절장치.The optical path control device according to claim 14, wherein the first electrode is formed of platinum or platinum / titanium. 제1항에 있어서, 상기 제2전극이 공통으로 바이어스된 광로조절장치.The optical path control device of claim 1, wherein the second electrode is commonly biased. 제16항에 있어서, 상기 제2전극이 금, 티타늄 또는 백금 등으로 형성된 광로조절장치.The optical path control device according to claim 16, wherein the second electrode is formed of gold, titanium, platinum, or the like. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930022798A 1993-10-29 1993-10-29 An optical path regulating apparatus KR970006685B1 (en)

Priority Applications (19)

Application Number Priority Date Filing Date Title
KR1019930022798A KR970006685B1 (en) 1993-10-29 1993-10-29 An optical path regulating apparatus
PL94314124A PL176406B1 (en) 1993-10-29 1994-10-25 System of movable thin-layer mirrors and method of making such system
RU96110182/09A RU2140722C1 (en) 1993-10-29 1994-10-25 Thin-film actuated mirror matrix and process of its manufacture
CZ19961180A CZ288846B6 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and method for the manufacture thereof.
HU9601094A HU220516B1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and method for its manufacture
AU80052/94A AU693119B2 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture
PCT/KR1994/000148 WO1995012287A1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture
BR9407923A BR9407923A (en) 1993-10-29 1994-10-25 Set of M x N thin film actuated mirrors optical projection system and process for manufacturing a set of M x N thin film actuated mirrors
CN94193967A CN1047056C (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and method for its manufacture
CA002175198A CA2175198A1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture
JP51252995A JP3283881B2 (en) 1993-10-29 1994-10-25 M × N thin-film actuated mirror array and method of manufacturing the same
MYPI94002871A MY113977A (en) 1993-10-29 1994-10-28 Thin film actuated mirror array and method for the manufacture thereof
ES94117124T ES2140490T3 (en) 1993-10-29 1994-10-28 MATRIX OF THIN FILM DRIVEN MIRRORS AND ITS MANUFACTURING METHOD.
EP94117124A EP0651274B1 (en) 1993-10-29 1994-10-28 Thin film actuated mirror array and method for the manufacture thereof
DE69420666T DE69420666T2 (en) 1993-10-29 1994-10-28 Arrangement of controlled thin film mirrors and process for their production
US08/331,399 US5661611A (en) 1993-10-29 1994-10-28 Thin film actuated mirror array and method for the manufacture thereof
TW083110157A TW279930B (en) 1993-10-29 1994-11-03
US08/877,084 US5900998A (en) 1993-10-29 1997-06-17 Thin film actuated mirror array and method for the manufacture thereof
US08/877,645 US5936757A (en) 1993-10-29 1997-06-17 Thin film actuated mirror array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930022798A KR970006685B1 (en) 1993-10-29 1993-10-29 An optical path regulating apparatus

Publications (2)

Publication Number Publication Date
KR950013237A true KR950013237A (en) 1995-05-17
KR970006685B1 KR970006685B1 (en) 1997-04-29

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KR1019930022798A KR970006685B1 (en) 1993-10-29 1993-10-29 An optical path regulating apparatus

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100778868B1 (en) * 2006-09-01 2007-11-22 동부일렉트로닉스 주식회사 Digital lighting processor and manufacturing method thereof
KR101041791B1 (en) * 2003-08-25 2011-06-17 엘지전자 주식회사 Method for detecting remain power in smart battery

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101041791B1 (en) * 2003-08-25 2011-06-17 엘지전자 주식회사 Method for detecting remain power in smart battery
KR100778868B1 (en) * 2006-09-01 2007-11-22 동부일렉트로닉스 주식회사 Digital lighting processor and manufacturing method thereof

Also Published As

Publication number Publication date
KR970006685B1 (en) 1997-04-29

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