KR950009937A - Alignment Mark Structure - Google Patents
Alignment Mark Structure Download PDFInfo
- Publication number
- KR950009937A KR950009937A KR1019930018019A KR930018019A KR950009937A KR 950009937 A KR950009937 A KR 950009937A KR 1019930018019 A KR1019930018019 A KR 1019930018019A KR 930018019 A KR930018019 A KR 930018019A KR 950009937 A KR950009937 A KR 950009937A
- Authority
- KR
- South Korea
- Prior art keywords
- alignment mark
- pattern
- alignment
- wafer
- narrow
- Prior art date
Links
Abstract
본 발명은 웨이퍼상에 형성되는 얼라인먼트마크에 좁은 도량형으로 패턴이 형성되므로써, 얼라인먼트마크 주위로 감광막의 스핀코팅이 균일하게 되어 각층간의 정렬특성을 향상시켜 광학적으로 정렬시 빛의 간섭에 의한 오정렬현상을 대폭 줄일 수 있는 것이다.According to the present invention, since the pattern is formed in the alignment mark formed on the wafer in a narrow metrology form, the spin coating of the photoresist film is uniform around the alignment mark, thereby improving the alignment characteristics between the layers, thereby improving misalignment caused by interference of light during optical alignment. It can be greatly reduced.
이를 위해, 본 발명은 웨이퍼(1)상에 형성되는 얼라인먼트마크(2)에 감광막(3)의 코팅시 균일하게 될수 있도록 좁은 도량형으로 패턴이 형성된 얼라인먼트마크의 구조이다.To this end, the present invention is a structure of an alignment mark in which a pattern is formed in a narrow metrology form so that the alignment mark 2 formed on the wafer 1 can be uniformly coated when the photosensitive film 3 is coated.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제4도는 본 발명을 나타낸 평면도,4 is a plan view showing the present invention,
제5도의 (a) 및 (b)는 제4도의 B-B선 단면도.(A) and (b) of FIG. 5 are sectional views taken along line B-B of FIG.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930018019A KR950009937A (en) | 1993-09-08 | 1993-09-08 | Alignment Mark Structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930018019A KR950009937A (en) | 1993-09-08 | 1993-09-08 | Alignment Mark Structure |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950009937A true KR950009937A (en) | 1995-04-26 |
Family
ID=66823818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930018019A KR950009937A (en) | 1993-09-08 | 1993-09-08 | Alignment Mark Structure |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950009937A (en) |
-
1993
- 1993-09-08 KR KR1019930018019A patent/KR950009937A/en not_active Application Discontinuation
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E601 | Decision to refuse application |