KR950004786U - 순수 승압 장치 - Google Patents
순수 승압 장치Info
- Publication number
- KR950004786U KR950004786U KR2019930014359U KR930014359U KR950004786U KR 950004786 U KR950004786 U KR 950004786U KR 2019930014359 U KR2019930014359 U KR 2019930014359U KR 930014359 U KR930014359 U KR 930014359U KR 950004786 U KR950004786 U KR 950004786U
- Authority
- KR
- South Korea
- Prior art keywords
- booster
- pure
- pure booster
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019930014359U KR960000137Y1 (ko) | 1993-07-29 | 1993-07-29 | 순수 승압 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019930014359U KR960000137Y1 (ko) | 1993-07-29 | 1993-07-29 | 순수 승압 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR950004786U true KR950004786U (ko) | 1995-02-18 |
| KR960000137Y1 KR960000137Y1 (ko) | 1996-01-04 |
Family
ID=19360185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019930014359U KR960000137Y1 (ko) | 1993-07-29 | 1993-07-29 | 순수 승압 장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR960000137Y1 (ko) |
-
1993
- 1993-07-29 KR KR2019930014359U patent/KR960000137Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR960000137Y1 (ko) | 1996-01-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20080102 Year of fee payment: 13 |
|
| EXPY | Expiration of term |