KR950002224U - Device for preventing the phenomenon of rosette in the diffusion furnace - Google Patents
Device for preventing the phenomenon of rosette in the diffusion furnaceInfo
- Publication number
- KR950002224U KR950002224U KR2019930010957U KR930010957U KR950002224U KR 950002224 U KR950002224 U KR 950002224U KR 2019930010957 U KR2019930010957 U KR 2019930010957U KR 930010957 U KR930010957 U KR 930010957U KR 950002224 U KR950002224 U KR 950002224U
- Authority
- KR
- South Korea
- Prior art keywords
- rosette
- phenomenon
- preventing
- diffusion furnace
- diffusion
- Prior art date
Links
- 238000009792 diffusion process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930010957U KR960000142Y1 (en) | 1993-06-21 | 1993-06-21 | Rosette prevention apparatus of diffusion furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930010957U KR960000142Y1 (en) | 1993-06-21 | 1993-06-21 | Rosette prevention apparatus of diffusion furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950002224U true KR950002224U (en) | 1995-01-04 |
KR960000142Y1 KR960000142Y1 (en) | 1996-01-04 |
Family
ID=19357471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930010957U KR960000142Y1 (en) | 1993-06-21 | 1993-06-21 | Rosette prevention apparatus of diffusion furnace |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960000142Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210066486A (en) * | 2019-11-28 | 2021-06-07 | 광주과학기술원 | Smart Buoy with Improved Grip |
-
1993
- 1993-06-21 KR KR2019930010957U patent/KR960000142Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210066486A (en) * | 2019-11-28 | 2021-06-07 | 광주과학기술원 | Smart Buoy with Improved Grip |
Also Published As
Publication number | Publication date |
---|---|
KR960000142Y1 (en) | 1996-01-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20041220 Year of fee payment: 10 |
|
LAPS | Lapse due to unpaid annual fee |