KR950001269U - Sputter power supply - Google Patents

Sputter power supply

Info

Publication number
KR950001269U
KR950001269U KR2019930009723U KR930009723U KR950001269U KR 950001269 U KR950001269 U KR 950001269U KR 2019930009723 U KR2019930009723 U KR 2019930009723U KR 930009723 U KR930009723 U KR 930009723U KR 950001269 U KR950001269 U KR 950001269U
Authority
KR
South Korea
Prior art keywords
power supply
sputter power
sputter
supply
power
Prior art date
Application number
KR2019930009723U
Other languages
Korean (ko)
Other versions
KR950007230Y1 (en
Inventor
이정훈
Original Assignee
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to KR2019930009723U priority Critical patent/KR950007230Y1/en
Publication of KR950001269U publication Critical patent/KR950001269U/en
Application granted granted Critical
Publication of KR950007230Y1 publication Critical patent/KR950007230Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019930009723U 1993-06-05 1993-06-05 Power source device of a sputter KR950007230Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930009723U KR950007230Y1 (en) 1993-06-05 1993-06-05 Power source device of a sputter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930009723U KR950007230Y1 (en) 1993-06-05 1993-06-05 Power source device of a sputter

Publications (2)

Publication Number Publication Date
KR950001269U true KR950001269U (en) 1995-01-04
KR950007230Y1 KR950007230Y1 (en) 1995-09-04

Family

ID=19356527

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930009723U KR950007230Y1 (en) 1993-06-05 1993-06-05 Power source device of a sputter

Country Status (1)

Country Link
KR (1) KR950007230Y1 (en)

Also Published As

Publication number Publication date
KR950007230Y1 (en) 1995-09-04

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 19990629

Year of fee payment: 5

LAPS Lapse due to unpaid annual fee