KR940027595U - 스탭퍼 조명계내 집속렌즈부의 이물질 제거장치 - Google Patents

스탭퍼 조명계내 집속렌즈부의 이물질 제거장치

Info

Publication number
KR940027595U
KR940027595U KR2019930007994U KR930007994U KR940027595U KR 940027595 U KR940027595 U KR 940027595U KR 2019930007994 U KR2019930007994 U KR 2019930007994U KR 930007994 U KR930007994 U KR 930007994U KR 940027595 U KR940027595 U KR 940027595U
Authority
KR
South Korea
Prior art keywords
lighting system
removal device
focusing lens
foreign material
material removal
Prior art date
Application number
KR2019930007994U
Other languages
English (en)
Other versions
KR960006358Y1 (ko
Inventor
서영만
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019930007994U priority Critical patent/KR960006358Y1/ko
Publication of KR940027595U publication Critical patent/KR940027595U/ko
Application granted granted Critical
Publication of KR960006358Y1 publication Critical patent/KR960006358Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019930007994U 1993-05-13 1993-05-13 스탭퍼 조명계내 집속렌즈부의 이물질 제거장치 KR960006358Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930007994U KR960006358Y1 (ko) 1993-05-13 1993-05-13 스탭퍼 조명계내 집속렌즈부의 이물질 제거장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930007994U KR960006358Y1 (ko) 1993-05-13 1993-05-13 스탭퍼 조명계내 집속렌즈부의 이물질 제거장치

Publications (2)

Publication Number Publication Date
KR940027595U true KR940027595U (ko) 1994-12-10
KR960006358Y1 KR960006358Y1 (ko) 1996-07-23

Family

ID=19355200

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930007994U KR960006358Y1 (ko) 1993-05-13 1993-05-13 스탭퍼 조명계내 집속렌즈부의 이물질 제거장치

Country Status (1)

Country Link
KR (1) KR960006358Y1 (ko)

Also Published As

Publication number Publication date
KR960006358Y1 (ko) 1996-07-23

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