KR940027588U - 소수성필터의 웨팅장치 - Google Patents

소수성필터의 웨팅장치

Info

Publication number
KR940027588U
KR940027588U KR2019930008601U KR930008601U KR940027588U KR 940027588 U KR940027588 U KR 940027588U KR 2019930008601 U KR2019930008601 U KR 2019930008601U KR 930008601 U KR930008601 U KR 930008601U KR 940027588 U KR940027588 U KR 940027588U
Authority
KR
South Korea
Prior art keywords
hydrophobic filter
wetting device
wetting
hydrophobic
filter
Prior art date
Application number
KR2019930008601U
Other languages
English (en)
Other versions
KR200143993Y1 (ko
Inventor
이봉기
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019930008601U priority Critical patent/KR200143993Y1/ko
Publication of KR940027588U publication Critical patent/KR940027588U/ko
Application granted granted Critical
Publication of KR200143993Y1 publication Critical patent/KR200143993Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019930008601U 1993-05-20 1993-05-20 소수성필터의 웨팅장치 KR200143993Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930008601U KR200143993Y1 (ko) 1993-05-20 1993-05-20 소수성필터의 웨팅장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930008601U KR200143993Y1 (ko) 1993-05-20 1993-05-20 소수성필터의 웨팅장치

Publications (2)

Publication Number Publication Date
KR940027588U true KR940027588U (ko) 1994-12-10
KR200143993Y1 KR200143993Y1 (ko) 1999-06-15

Family

ID=19355624

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930008601U KR200143993Y1 (ko) 1993-05-20 1993-05-20 소수성필터의 웨팅장치

Country Status (1)

Country Link
KR (1) KR200143993Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411387A (zh) * 2017-08-16 2019-03-01 株式会社斯库林集团 药液供给装置、基板处理装置、药液供给方法、以及基板处理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411387A (zh) * 2017-08-16 2019-03-01 株式会社斯库林集团 药液供给装置、基板处理装置、药液供给方法、以及基板处理方法
CN109411387B (zh) * 2017-08-16 2022-03-25 株式会社斯库林集团 药液供给装置、基板处理装置、药液供给方法、以及基板处理方法

Also Published As

Publication number Publication date
KR200143993Y1 (ko) 1999-06-15

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