KR940025323U - 집적회로 외관 검사장치의 카메라 장착용 스테이지 - Google Patents

집적회로 외관 검사장치의 카메라 장착용 스테이지

Info

Publication number
KR940025323U
KR940025323U KR2019930006644U KR930006644U KR940025323U KR 940025323 U KR940025323 U KR 940025323U KR 2019930006644 U KR2019930006644 U KR 2019930006644U KR 930006644 U KR930006644 U KR 930006644U KR 940025323 U KR940025323 U KR 940025323U
Authority
KR
South Korea
Prior art keywords
integrated circuit
inspection device
visual inspection
camera mounting
mounting stage
Prior art date
Application number
KR2019930006644U
Other languages
English (en)
Other versions
KR0117415Y1 (ko
Inventor
오석주
Original Assignee
삼성항공산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성항공산업주식회사 filed Critical 삼성항공산업주식회사
Priority to KR2019930006644U priority Critical patent/KR0117415Y1/ko
Publication of KR940025323U publication Critical patent/KR940025323U/ko
Application granted granted Critical
Publication of KR0117415Y1 publication Critical patent/KR0117415Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR2019930006644U 1993-04-26 1993-04-26 집적회로 외관 검사장치의 카메라 장착용 스테이지 KR0117415Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930006644U KR0117415Y1 (ko) 1993-04-26 1993-04-26 집적회로 외관 검사장치의 카메라 장착용 스테이지

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930006644U KR0117415Y1 (ko) 1993-04-26 1993-04-26 집적회로 외관 검사장치의 카메라 장착용 스테이지

Publications (2)

Publication Number Publication Date
KR940025323U true KR940025323U (ko) 1994-11-18
KR0117415Y1 KR0117415Y1 (ko) 1998-06-01

Family

ID=19354218

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930006644U KR0117415Y1 (ko) 1993-04-26 1993-04-26 집적회로 외관 검사장치의 카메라 장착용 스테이지

Country Status (1)

Country Link
KR (1) KR0117415Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200018909A (ko) * 2018-08-13 2020-02-21 유상우 드럼 검사 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200018909A (ko) * 2018-08-13 2020-02-21 유상우 드럼 검사 장치

Also Published As

Publication number Publication date
KR0117415Y1 (ko) 1998-06-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee