KR940023552U - Structure of Spin Dryer - Google Patents

Structure of Spin Dryer

Info

Publication number
KR940023552U
KR940023552U KR2019930004009U KR930004009U KR940023552U KR 940023552 U KR940023552 U KR 940023552U KR 2019930004009 U KR2019930004009 U KR 2019930004009U KR 930004009 U KR930004009 U KR 930004009U KR 940023552 U KR940023552 U KR 940023552U
Authority
KR
South Korea
Prior art keywords
spin dryer
dryer
spin
Prior art date
Application number
KR2019930004009U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930004009U priority Critical patent/KR940023552U/en
Publication of KR940023552U publication Critical patent/KR940023552U/en

Links

KR2019930004009U 1993-03-18 1993-03-18 Structure of Spin Dryer KR940023552U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930004009U KR940023552U (en) 1993-03-18 1993-03-18 Structure of Spin Dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930004009U KR940023552U (en) 1993-03-18 1993-03-18 Structure of Spin Dryer

Publications (1)

Publication Number Publication Date
KR940023552U true KR940023552U (en) 1994-10-22

Family

ID=60914946

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930004009U KR940023552U (en) 1993-03-18 1993-03-18 Structure of Spin Dryer

Country Status (1)

Country Link
KR (1) KR940023552U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030002070A (en) * 2001-06-30 2003-01-08 삼성전자 주식회사 Anti-stiction drying method of wafer using centrifugal force and apparatus thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030002070A (en) * 2001-06-30 2003-01-08 삼성전자 주식회사 Anti-stiction drying method of wafer using centrifugal force and apparatus thereof

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application