KR940023552U - Structure of Spin Dryer - Google Patents
Structure of Spin DryerInfo
- Publication number
- KR940023552U KR940023552U KR2019930004009U KR930004009U KR940023552U KR 940023552 U KR940023552 U KR 940023552U KR 2019930004009 U KR2019930004009 U KR 2019930004009U KR 930004009 U KR930004009 U KR 930004009U KR 940023552 U KR940023552 U KR 940023552U
- Authority
- KR
- South Korea
- Prior art keywords
- spin dryer
- dryer
- spin
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930004009U KR940023552U (en) | 1993-03-18 | 1993-03-18 | Structure of Spin Dryer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930004009U KR940023552U (en) | 1993-03-18 | 1993-03-18 | Structure of Spin Dryer |
Publications (1)
Publication Number | Publication Date |
---|---|
KR940023552U true KR940023552U (en) | 1994-10-22 |
Family
ID=60914946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930004009U KR940023552U (en) | 1993-03-18 | 1993-03-18 | Structure of Spin Dryer |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR940023552U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030002070A (en) * | 2001-06-30 | 2003-01-08 | 삼성전자 주식회사 | Anti-stiction drying method of wafer using centrifugal force and apparatus thereof |
-
1993
- 1993-03-18 KR KR2019930004009U patent/KR940023552U/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030002070A (en) * | 2001-06-30 | 2003-01-08 | 삼성전자 주식회사 | Anti-stiction drying method of wafer using centrifugal force and apparatus thereof |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |