KR940016957U - 감광액 공급장치 - Google Patents
감광액 공급장치Info
- Publication number
- KR940016957U KR940016957U KR2019920027796U KR920027796U KR940016957U KR 940016957 U KR940016957 U KR 940016957U KR 2019920027796 U KR2019920027796 U KR 2019920027796U KR 920027796 U KR920027796 U KR 920027796U KR 940016957 U KR940016957 U KR 940016957U
- Authority
- KR
- South Korea
- Prior art keywords
- supply device
- photoresist supply
- photoresist
- supply
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92027796U KR0124546Y1 (ko) | 1992-12-30 | 1992-12-30 | 감광액 공급장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92027796U KR0124546Y1 (ko) | 1992-12-30 | 1992-12-30 | 감광액 공급장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940016957U true KR940016957U (ko) | 1994-07-25 |
KR0124546Y1 KR0124546Y1 (ko) | 1998-09-15 |
Family
ID=19348905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR92027796U KR0124546Y1 (ko) | 1992-12-30 | 1992-12-30 | 감광액 공급장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0124546Y1 (ko) |
-
1992
- 1992-12-30 KR KR92027796U patent/KR0124546Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0124546Y1 (ko) | 1998-09-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20040331 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |