KR940012482A - Vacuum - Google Patents

Vacuum Download PDF

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Publication number
KR940012482A
KR940012482A KR1019930023498A KR930023498A KR940012482A KR 940012482 A KR940012482 A KR 940012482A KR 1019930023498 A KR1019930023498 A KR 1019930023498A KR 930023498 A KR930023498 A KR 930023498A KR 940012482 A KR940012482 A KR 940012482A
Authority
KR
South Korea
Prior art keywords
vacuum
chamber
purge
wall surface
dust
Prior art date
Application number
KR1019930023498A
Other languages
Korean (ko)
Inventor
마사키 스즈키
토시미치 이시다
쇼이치 와타나베
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 모리시타 요이찌, 마쯔시다덴기산교 가부시기가이샤 filed Critical 모리시타 요이찌
Publication of KR940012482A publication Critical patent/KR940012482A/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere

Abstract

본 발명은, 진공예비실과 진공가공실을 구비한 진공장치에 관한 것으로서, 가스공급시 또는 가스배기시에 가스기류의 흐뜨러짐을 억제하고, 제품기판에의 먼지부착을 감소시키는 진공장치를 제공하는 것을 목적으로 한 것이며 그 구성에 있어서, 진공예비실(11)내에 대략 직6면체의 진공실과 퍼지가스관(14)이 개구하는 퍼지실(12)을 형성하고, 퍼지실(12)과 진공실과의 사이에 거의 1벽면을 차지하고, 유해먼지를 여과하는 필터(13)가 배설되고, 필터(13)에 대향하는 벽면에 거의 벽면을 차지하는 배기구(25)을 형성한 것을 특징으로 한 것이다. 이로써, 진공예비실내에 있어서, 퍼지시 및 진공배기시에 다같이 가스의 흐름은 층류가 되어 먼지말아올림을 억제하고, 피가공물에 부착하는 먼지를 감소시킨다. 또한 진공화시간 및 퍼지시간을 단축하는 일이 가능하다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum apparatus having a vacuum reserve chamber and a vacuum processing chamber. The present invention relates to a vacuum apparatus that suppresses the flow of gas streams during gas supply or gas exhaust, and reduces adhesion of dust to product substrates. In this configuration, a vacuum chamber of a substantially rectangular parallelepiped and a purge chamber 12 through which the purge gas pipe 14 opens are formed in the vacuum reserve chamber 11, and the purge chamber 12 and the vacuum chamber are formed. The filter 13 which occupies almost one wall surface and filters harmful dust is arrange | positioned in between, and the exhaust port 25 which occupies nearly wall surface is formed in the wall surface which opposes the filter 13. It is characterized by the above-mentioned. As a result, in the vacuum reserve chamber, the gas flow becomes a laminar flow at the time of purge and vacuum exhaust, thereby suppressing the rolling of dust and reducing the dust adhering to the workpiece. It is also possible to shorten the vacuumization time and the purge time.

Description

진공장치Vacuum

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 제1실시예에 있어서의 로드록식 진공장치의 구성도.1 is a block diagram of a load lock vacuum apparatus according to a first embodiment of the present invention.

제2도는, 본 발명의 제1실시예에 있어서의 제1도의 X-X 단면도.2 is a cross-sectional view taken along line X-X in FIG. 1 according to the first embodiment of the present invention.

Claims (2)

기판이 출입하는 2개의 게이트와, 진공배기구와, 피지가스공급구를 구비하고, 기판이 통과하는 진공예비실과, 진공가공실을 구비한 진공장치에 있어서, 진공예비실이, 대략 직6면체의 진공실과, 퍼지가스관이 개구된 가스공급실과 진공실과 퍼지가스공급실과의 사이의 거의 1벽면을 차지하여 먼지를 여과하는 필터를 가진 것을 특징으로 하는 진공장치.In a vacuum apparatus having two gates through which a substrate enters and exits, a vacuum exhaust port, a sebum gas supply port, and a vacuum preservation chamber through which the substrate passes, and a vacuum processing chamber, the vacuum preservation chamber is formed of a substantially rectangular parallelepiped. A vacuum apparatus comprising a vacuum chamber and a filter for filtering dust by occupying almost one wall surface between the gas supply chamber in which the purge gas pipe is opened and the vacuum chamber and the purge gas supply chamber. 제1항에 있어서, 필터면에 대향하는 벽면에 거의 1벽면을 차지하는 가스배기구를 가지고, 진공예비실내의 퍼지가스의 흐름이 층류가 되는 것을 촉진하는 것을 특징으로 하는 진공장치.The vacuum apparatus according to claim 1, further comprising a gas exhaust port occupying almost one wall surface on a wall surface opposed to the filter surface, and promoting a flow of purge gas in the vacuum preliminary chamber into laminar flow. ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: This is to be disclosed by the original application.
KR1019930023498A 1992-11-17 1993-11-06 Vacuum KR940012482A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4306712A JPH06158284A (en) 1992-11-17 1992-11-17 Vacuum equipment
JP92-306712 1992-11-17

Publications (1)

Publication Number Publication Date
KR940012482A true KR940012482A (en) 1994-06-23

Family

ID=17960401

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930023498A KR940012482A (en) 1992-11-17 1993-11-06 Vacuum

Country Status (2)

Country Link
JP (1) JPH06158284A (en)
KR (1) KR940012482A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101664939B1 (en) * 2010-12-09 2016-10-11 도쿄엘렉트론가부시키가이샤 Load lock device
EP3321003B1 (en) * 2016-11-11 2019-01-09 SLM Solutions Group AG Apparatus and method for producing a three-dimensional work piece with improved gas flow
WO2021044622A1 (en) * 2019-09-06 2021-03-11 キヤノンアネルバ株式会社 Load lock device

Also Published As

Publication number Publication date
JPH06158284A (en) 1994-06-07

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application