KR940009947A - Manufacturing method of thin film magnetic head - Google Patents

Manufacturing method of thin film magnetic head Download PDF

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Publication number
KR940009947A
KR940009947A KR1019920018730A KR920018730A KR940009947A KR 940009947 A KR940009947 A KR 940009947A KR 1019920018730 A KR1019920018730 A KR 1019920018730A KR 920018730 A KR920018730 A KR 920018730A KR 940009947 A KR940009947 A KR 940009947A
Authority
KR
South Korea
Prior art keywords
manufacturing
beo
thin film
head
film magnetic
Prior art date
Application number
KR1019920018730A
Other languages
Korean (ko)
Other versions
KR100216928B1 (en
Inventor
이재욱
Original Assignee
강진구
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 강진구, 삼성전자 주식회사 filed Critical 강진구
Priority to KR1019920018730A priority Critical patent/KR100216928B1/en
Publication of KR940009947A publication Critical patent/KR940009947A/en
Application granted granted Critical
Publication of KR100216928B1 publication Critical patent/KR100216928B1/en

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

본 발명은 박막자기 헤드의 제조방법에 관한 것으로, 좀 더 구체적으로는 적어도 한층 또는 그 이상의 절연층(2, 4 및 6)을 BeO로 형성시키고, 도전층(5)을 BeCu로 형성시켜서 박막자기 헤드를 제조하는 것에 관한 것이다.The present invention relates to a method of manufacturing a thin film magnetic head, and more particularly, at least one or more insulating layers 2, 4, and 6 are formed of BeO, and the conductive layer 5 is formed of BeCu. Relates to manufacturing the head.

본 발명에 의하여 NiFe자성층과 열??창계수가 동일한 BeO를 절연체로 사용하므로서 자성층과 절연층간의 박리 및 압축응력에 의한 자기 특성저하를 방지하고 BeO 절연체의 높은 열간도율로 인하여 외부로의 열발산 효과를 증대시켜 헤드 특성을 증대시키며 도전체로 BeCu를 사용하므로서 전기전도성, 내식성, 내마모성 및 밀착성이 우수한 도전층 형성할 수 있었으며 하나의 배취내에서 동일 스퍼터링 타rpt으로 연속적인 공정이 진행하므로서 매우 효율적인 장점이 있다.According to the present invention, by using BeO having the same NiO magnetic layer and thermal window coefficient as the insulator, the magnetic properties are prevented from being deteriorated by peeling and compressive stress between the magnetic layer and the insulating layer, and the heat dissipation to the outside due to the high thermal conductivity of the BeO insulator. Increasing the effect to increase the head characteristics and using BeCu as a conductor, it was possible to form a conductive layer excellent in electrical conductivity, corrosion resistance, abrasion resistance and adhesion, and a very efficient advantage as a continuous process with the same sputtering tarp in one batch There is this.

Description

박막자기 헤드의 제조방법Manufacturing method of thin film magnetic head

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 박막자기 헤드의 단면도이다.1 is a cross-sectional view of the thin film magnetic head of the present invention.

Claims (2)

박막자기 헤드의 제조에 있어서, 적어도 한층 또는 그 이상의 절연층(2, 4 및 6)을 BeO로 형성시키고, 도전층(5)을 BeCu로 형성시키는 것을 특징으로 하는 박막자기 헤드의 제조방법.In the manufacture of a thin film magnetic head, at least one or more insulating layers (2, 4 and 6) are formed of BeO and the conductive layer (5) is formed of BeCu. 제1항에 있어서, 상기 공정은 활성 스퍼터링법을 이용하여 하나의 배취에서 연속적으로 진행시키는 것을 특징으로 하는 박막자기 헤드의 제조방법.2. The method of claim 1, wherein the process is performed continuously in one batch using an active sputtering method. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019920018730A 1992-10-12 1992-10-12 Manufacturing method of thin film magnetic head KR100216928B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920018730A KR100216928B1 (en) 1992-10-12 1992-10-12 Manufacturing method of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920018730A KR100216928B1 (en) 1992-10-12 1992-10-12 Manufacturing method of thin film magnetic head

Publications (2)

Publication Number Publication Date
KR940009947A true KR940009947A (en) 1994-05-24
KR100216928B1 KR100216928B1 (en) 1999-09-01

Family

ID=19341014

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920018730A KR100216928B1 (en) 1992-10-12 1992-10-12 Manufacturing method of thin film magnetic head

Country Status (1)

Country Link
KR (1) KR100216928B1 (en)

Also Published As

Publication number Publication date
KR100216928B1 (en) 1999-09-01

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