KR940006468U - 엠비피의 로터 회전 감지장치 - Google Patents

엠비피의 로터 회전 감지장치

Info

Publication number
KR940006468U
KR940006468U KR2019920014667U KR920014667U KR940006468U KR 940006468 U KR940006468 U KR 940006468U KR 2019920014667 U KR2019920014667 U KR 2019920014667U KR 920014667 U KR920014667 U KR 920014667U KR 940006468 U KR940006468 U KR 940006468U
Authority
KR
South Korea
Prior art keywords
mbp
detection device
rotation detection
rotor rotation
rotor
Prior art date
Application number
KR2019920014667U
Other languages
English (en)
Other versions
KR0128254Y1 (ko
Inventor
이득주
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019920014667U priority Critical patent/KR0128254Y1/ko
Publication of KR940006468U publication Critical patent/KR940006468U/ko
Application granted granted Critical
Publication of KR0128254Y1 publication Critical patent/KR0128254Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR2019920014667U 1992-08-05 1992-08-05 엠비피의 로터 회전 감지장치 KR0128254Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019920014667U KR0128254Y1 (ko) 1992-08-05 1992-08-05 엠비피의 로터 회전 감지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019920014667U KR0128254Y1 (ko) 1992-08-05 1992-08-05 엠비피의 로터 회전 감지장치

Publications (2)

Publication Number Publication Date
KR940006468U true KR940006468U (ko) 1994-03-25
KR0128254Y1 KR0128254Y1 (ko) 1998-12-01

Family

ID=19337997

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019920014667U KR0128254Y1 (ko) 1992-08-05 1992-08-05 엠비피의 로터 회전 감지장치

Country Status (1)

Country Link
KR (1) KR0128254Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100513396B1 (ko) * 1999-02-04 2005-09-09 삼성전자주식회사 반도체 제조용 스퍼터링 장치

Also Published As

Publication number Publication date
KR0128254Y1 (ko) 1998-12-01

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Legal Events

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