KR940006467U - Sputter film formation device - Google Patents
Sputter film formation deviceInfo
- Publication number
- KR940006467U KR940006467U KR2019920014870U KR920014870U KR940006467U KR 940006467 U KR940006467 U KR 940006467U KR 2019920014870 U KR2019920014870 U KR 2019920014870U KR 920014870 U KR920014870 U KR 920014870U KR 940006467 U KR940006467 U KR 940006467U
- Authority
- KR
- South Korea
- Prior art keywords
- film formation
- formation device
- sputter film
- sputter
- formation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019920014870U KR0132342Y1 (en) | 1992-08-07 | 1992-08-07 | Sputter deposition apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019920014870U KR0132342Y1 (en) | 1992-08-07 | 1992-08-07 | Sputter deposition apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940006467U true KR940006467U (en) | 1994-03-25 |
KR0132342Y1 KR0132342Y1 (en) | 1999-02-01 |
Family
ID=19338153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019920014870U KR0132342Y1 (en) | 1992-08-07 | 1992-08-07 | Sputter deposition apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0132342Y1 (en) |
-
1992
- 1992-08-07 KR KR2019920014870U patent/KR0132342Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0132342Y1 (en) | 1999-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20060330 Year of fee payment: 9 |
|
EXPY | Expiration of term |