KR940006329B1 - Floor panels for clean room - Google Patents

Abstract

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Description

Floor panel for dustproof room

1 is a perspective view of a floor panel according to an embodiment of the present invention.

2 is a partial cross-sectional front view of the bottom panel of FIG.

3 is a partial cross-sectional view of a floor panel according to another embodiment of the present invention.

4 is a partial cross-sectional view of a floor panel according to another embodiment of the present invention.

5 is a partial cross-sectional view of a floor panel according to another embodiment of the present invention.

6 is a partial perspective view of a floor panel according to another embodiment of the present invention.

7 is a partial cross-sectional front view of a floor panel according to another embodiment of the present invention.

8 is a partially enlarged cross-sectional view of a bottom panel according to another exemplary embodiment of the present invention.

9 is a partially enlarged cross-sectional view of a bottom panel according to another exemplary embodiment of the present invention.

10 is a partial cross-sectional view of the bottom panel according to another embodiment of the present invention.

* Explanation of symbols for main parts of the drawings

1: bottom panel 2: panel body

3: protective metal plate 4: outer rib

5: side wall 8: shoulder

10: upper surface 11, 12: hole

13: collar 14: ablation

15: Home 16: Rim

17: protrusion 18: inclined surface

19: corner 20: buffer plate

The present invention relates to a floor panel used in the dustproof chamber, and more particularly to a floor panel having a protective metal plate on the surface layer.

Conventionally, in the floor plate used in the computer room, telephone exchange room or the information processing device room, the floor plate is installed on the floor with a slight distance from the base floor, and air ducts, water pipes, and electric wires are disposed below the floor. Then, the air was circulated through the hole formed in the bottom panel to achieve air conditioning. Such a floor is called a "free access floor".

Free space floor panels are usually made of aluminum, cast iron, plywood or small pieces. These may be coated with a sheet of various materials such as plywood or single board or concrete, tile, plastic, carpet, and the like.

Today, in the production, assembly, use, or testing of semiconductor chips, precision materials and devices, and their components, a room that must be practiced with all dust removed is practically used. To meet this high level of cleanliness, no dust should remain on the floor panels and no dust. Even the smallest dust of about 0.5 μm is forbidden in such dustproof rooms, and the fine particles generated from the floor panels due to the wear of shoes or wheels can damage the operation that is going on in the room. Moreover, when corrosive chemicals such as acids are used in the dust chamber, the floor panels must be made corrosion resistant to prevent accidental corrosion.

Japanese Utility Model Publication No. 50-148830 (published Dec. 10, 1975) made a panel body made of calcium silicide, and bonded a metal plate on the lower surface of the panel body, and the upper surface of the panel body was coated with vinyl chloride or carpet. Free space floor panels are described.

Japanese Utility Model Laid-Open No. 57-38433 (published on May 1, 1982) describes a floor panel having a surface made of cement or calcium silicate and carbon fiber and having a surface treatment.

In addition, Japanese Patent Laid-Open No. 58-160470 (published on September 22, 1983) discloses a floor panel made of a concrete body and covering the entire surface of the panel body with a metal plate. In these publications, the floor panel consists of a cement or calcium silicate panel body, which is very dusty.

Therefore, in the above prior arts, the entire surface of the panel body should be covered with a protective layer such as plastic or metal plate to prevent dust from being generated. However, covering the entire surface of the panel body with a metal or plastic plate is not only cumbersome but also expensive to manufacture, and this structure has the drawback that it is almost impossible to provide air conditioning holes in the plate.

Japanese Utility Model Publication No. 58-186045 (published Dec. 10, 1983) discloses a free space floor panel composed of an aluminum upper layer and a steel lower layer. The aluminum top layer is covered with a resin tile. Thus, the floor panel consists of three layers, which are somewhat complicated in structure and relatively heavy. In addition, resin tiles have poor wear resistance and corrosion resistance.

Japanese Utility Model Laid-Open No. 59-120237 (published Aug. 14, 1984) describes a floor panel having a structure in which a panel body is made of plywood or a small piece of plate, and the entire surface of the panel body is covered with a synthetic resin board. This structure also has the disadvantage that the panel body is completely covered by a synthetic resin plate, and synthetic resin is used, and thus, wear resistance and corrosion resistance are not good.

As described above, in the above-described prior arts, the floor panel is not excellent in abrasion resistance and corrosion resistance, or the mechanical strength is not sufficient and the structure is not a simple structure.

SUMMARY OF THE INVENTION An object of the present invention is to provide a floor panel for a dustproof room having excellent mechanical strength while having excellent resistance to wear and corrosion.

Another object of the present invention is to provide a fairly light floor panel with a simple structure.

The floor panel used for the floor mounted on the dustproof chamber according to the present invention is composed of an aluminum panel body and a protective metal plate coupled on the upper surface of the body.

The panel body can be provided with grooves that run parallel to the edges of the panel body on its upper surface, with rims inserted therein to prevent the protective plate from peeling off. In addition, a buffer plate may be interposed between the panel body and the protective metal plate to reduce noise while absorbing the maximum impact.

Hereinafter, exemplary embodiments will be described in detail with reference to the accompanying drawings.

1 shows that the bottom panel 1 according to the present invention is composed of an aluminum bottom panel body 2 and a protective metal plate 3 covering the upper surface and sidewalls 5 of the panel body 2. .

2 shows a detailed structure of the bottom panel 1. The outer rib 4 extends downwardly from both side walls 5 of the panel body 2 via the shoulder 8. The upper side of the panel body 2 is parallel to the side wall 5 and extends downward. A plurality of inner ribs 9 are provided. The upper surface 10 and the side walls 5 of the panel body 2 are covered with a protective metal plate 3. The corner portion of the protective metal plate 3 covering the shoulder 8 is bent inward to prevent leakage of the adhesive for adhering the protective metal plate 3 to the panel body 2.

It is preferable that the panel body 2 is made of aluminum and the protective metal plate 3 is made of stainless steel sheet, because they have high wear resistance and corrosion resistance. It should be noted that the "aluminum" referred to herein is an aluminum based alloy added with small amounts of alloying elements such as copper, silicon, zinc, iron and the like. The stainless steel protective metal plate 3 is preferably 0.2 to 2 mm thick, and particularly preferably 0.3 to 1.0 mm. This protective metal plate is bonded on the panel body 2 by an adhesive.

A typical method of manufacturing the bottom panel 1 is as follows.

The aluminum alloy is dissolved and injected into the mold by die casting under a predetermined pressure. When the casting plate is slightly warped or deformed in the desired shape, it must be pressurized or hammered to remove this warp or deformation. The panel is then machined precisely, taking into account that the outer ribs 4 come into contact with those of the other panels when they are removed and assembled on the floor. The upper surface is treated to be suitable for bonding the protective metal plate 3 by, for example, shot blasting. The protective metal plate 3 is molded into an open box shape, for example, by cutting four corners to bend the edges inwards, or by pressing the panel to plastically deform the upright wall portion. After adhering the protective metal plate 3 on the panel body 2, the edge of this protective plate is bent inward on the inclined surface of the shoulder.

3 is a view of another embodiment of the floor panel according to the present invention is given the same reference numerals for the same parts as the second. The panel body 2 and the protective metal plate 3 both have a plurality of holes, and these holes are aligned with each other. In this embodiment, the holes 11 of the protective metal plate 3 are slightly smaller than the holes 12 of the panel body 2, so that the hole edges of the panel body 2 are the holes 11 of the protective metal plate 3. It certainly prevents it from appearing inside.

The hole 12 of the panel body 2 is of a type in which the diameter thereof expands downward as shown in FIG. At this time, the magnification angle α is 5 ° to 20 ° at an angle formed between the side wall of the hole 12 and the vertical line, thereby facilitating the flow of air through the hole in the bottom.

5 shows another embodiment of the present invention, and each hole 11 of the protective metal plate 3 is provided with a collar 13 protruding downward. The collar 13 may be formed in the same shape in which the side surface of the protective metal plate 3 is upright, and by this structure, the hole 11 is deformed by an unexpected rough collision with a shoe or a leg. The protection metal plate 3 can be protected reliably so that this will not occur. In addition, even when corrosive chemicals fall on the floor, the collar 13 prevents the hole of the panel body from being corroded.

6 shows an example of each corner of the protective metal plate (3). In this corner, a cutout portion 14 is provided. The cutout portion is provided so that the cutout portion of the protective metal plate 3 can be bent inward as shown in FIG. The protective metal plate 3 having side walls can be easily manufactured by a single step press working.

7 shows another embodiment of the present invention, wherein the panel body 2 has a groove 15 on its upper surface 10, which grooves 15 each corner of the panel body 2; It is located parallel to and close to. The protective metal plate 3 is precisely manufactured to the size defined by these four grooves 15. The protective metal plate 3 is coupled on the upper surface of the panel body 2 so that the corners are accurately positioned at the inner edge of the groove 15. The L-shaped rim 16 is inserted into each hump 15 so that the space between the outer edge of the panel body 2 and the edge of the protective metal plate 3 is completely filled by the rim 16. For this purpose, the rim 16 is preferably made of a plastic material such as plastic or elastomer.

8 shows that the projection 17 can be installed on the rim 16. The inclined surface 18 of the rim 16 is in intimate contact with the inclined edge of the protective metal plate 3 when inserted into the groove 15 of the rim 16. The rim 16 of this structure protects the protective metal plate 16 from being peeled off even when the edges of the protective metal plate 16 are strongly impacted or strongly scratched. The inclination angle θ of the inclined surface 18 may be from 5 ° to 45 °.

9 shows another embodiment, the corner portion 19 of the protective metal plate 3 is bent and inserted into the groove 15 together with the rim 16. The leg of the rim 16 inserted into the groove 15 is slightly thicker than the empty space of the remaining groove 15 after inserting the corner portion 19 of the metal plate 3 into the groove, so that the rim 16 has a panel body. The edge of the protective metal plate (3) can be firmly held on (2). For this purpose, the rim 16 is preferably made of a material such as plastic or elastomer.

FIG. 10 shows yet another embodiment of the present invention, in which a buffer plate 20 is interposed between the panel body 2 and the protective metal plate 3. The buffer plate 20 may be made of plastic, elastomer, or other material capable of absorbing impact. This significantly reduces the vibration of the device installed on the floor. Therefore, the bottom panel with the buffer plate 20 is very suitable for indoor use for the installation of precision instruments or devices. When holes are provided in the panel, it is preferable that the holes of the buffer plate 20 be slightly larger than the holes of the protective metal plate 3 covering them so that the buffer plate 20 is not visible through the holes of the panel.

The floor panel made of the protective metal plate according to the present invention has excellent resistance to corrosion and abrasion. Therefore, it can be suitably used for indoor use of chemicals. Also, since there is little chance of dust, it is very suitable for dustproofing and the floor panel has a very light structure, so any facility installed under this floor panel can be easily lifted when necessary for maintenance or inspection. have. Moreover, the use of shock absorbers can reduce the vibrations that can occur in installed equipment, and such floor panels are most suitable when certain precision devices need to be mounted under vibration-free conditions. In addition, since the floor panel of the present invention has a relatively simple structure, there is an advantage that the manufacturing cost is low.

Although the present invention has been described with reference to several embodiments, the present invention is not limited to the above embodiments, and modifications and variations are possible without departing from the scope of the present invention.

Claims (4)

A floor panel for a dustproof chamber, comprising: an aluminum panel body through which a plurality of holes are penetrated, and a stainless steel protective metal plate bonded to cover the upper surface and sidewalls of the panel body, wherein the through holes of the protective metal plate are corresponding to each other. Floor panel for the dustproof room, characterized in that smaller than the through holes of the panel body. The floor panel according to claim 1, wherein each of the holes of the panel body is gradually increased as its diameter is lowered. The floor panel for a dustproof chamber according to claim 1, wherein the support collar of the protective metal plate extends downward into the through hole of the corresponding panel body in the through hole of the protective metal plate. The floor panel for a dustproof room according to claim 1, wherein a buffer plate is interposed between the aluminum panel body and the protective metal plate.

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