KR940004769A - Probe needle and its manufacturing method - Google Patents

Probe needle and its manufacturing method Download PDF

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Publication number
KR940004769A
KR940004769A KR1019930016109A KR930016109A KR940004769A KR 940004769 A KR940004769 A KR 940004769A KR 1019930016109 A KR1019930016109 A KR 1019930016109A KR 930016109 A KR930016109 A KR 930016109A KR 940004769 A KR940004769 A KR 940004769A
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KR
South Korea
Prior art keywords
gold
weight
parts
probe needle
probe
Prior art date
Application number
KR1019930016109A
Other languages
Korean (ko)
Other versions
KR100248570B1 (en
Inventor
사토루 야마시타
Original Assignee
이노우에 아키라
도오교오 에레구토론 가부시기가이샤
이노우에 쥰이치
도오교오 에레쿠토론 야마나시 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이노우에 아키라, 도오교오 에레구토론 가부시기가이샤, 이노우에 쥰이치, 도오교오 에레쿠토론 야마나시 가부시끼가이샤 filed Critical 이노우에 아키라
Publication of KR940004769A publication Critical patent/KR940004769A/en
Application granted granted Critical
Publication of KR100248570B1 publication Critical patent/KR100248570B1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • G01R1/06738Geometry aspects related to tip portion
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • C22C5/02Alloys based on gold
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755Material aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Abstract

프로우브침은 350℃온도 까지 가열한후에 룸온도로 5신간이상 냉각도어 74∼76중량부의 금과 024∼26중량부의 동과의 금-동 합금으로 이루어지는 Au-Cu 합금으로 형성된다.The probe needle is formed of an Au-Cu alloy consisting of a gold-copper alloy of 74 to 76 parts by weight of gold and 024 to 26 parts by weight of copper with a cooling door of at least 5 new ones at room temperature after heating to 350 ° C.

Description

프로우브침 및 그의 제조방법Probe needle and its manufacturing method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명 실시예에 다른 프로우브침을 나타내는 개략적인 도면,1 is a schematic diagram showing a probe probe according to an embodiment of the present invention;

제2도는 제1도 장치의 일부 확대도,2 is an enlarged view of a part of the device of FIG. 1;

제8도는 선재료의 저항 측정을 설명하기 위한 도면이다.8 is a view for explaining the resistance measurement of the wire material.

Claims (9)

소정온도 까지 가열한 후에 냉각되어 74-76 중량부의 금과, 024∼26중량부의 동과의 금-동 합금으로 이루어지는 프로우브침.A probe probe comprising a gold-copper alloy of 74-76 parts by weight of gold and 024 to 26 parts by weight of copper after heating to a predetermined temperature. 제1항에 있어서, 상기 소정온도는 약 350℃ 이상인 프로우브침.The probe needle of claim 1, wherein the predetermined temperature is about 350 ° C. or higher. 제1항에 있어서, 상기 소정온도는 약 350℃∼400℃인 프로우브침.The probe needle of claim 1, wherein the predetermined temperature is about 350 ° C to 400 ° C. 제1항에 있어서, 상기 소정온도는 약 350℃ 인 프로우브침.The probe needle of claim 1, wherein the predetermined temperature is about 350 ° C. 제1항에 있어서, 상기 도포는 5시간이상에서 실온으로 되는 도포인 프로우브침.The probe needle according to claim 1, wherein the coating is a coating which is brought to room temperature for at least 5 hours. 제1항에 있어서, 상기 도포는 가열전의 프로우브 저항값을 약 40%로 하는 냉각인 프로우브침.The probe needle of claim 1 wherein said coating is cooling with a probe resistance value of about 40% prior to heating. 프로우브침의 길이당 약 0.8Ω의 저항값을 가지며 74∼76중량부의 금과, 24∼26중량부의 동과의 금-동 합금으로 이루어지는 프로우브침.A probe needle comprising a gold-copper alloy of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper with a resistance of about 0.8 ohms per probe needle length. 74∼76중량부의 금과,24∼26중량부의 동과의 금-동합금으로 이루어진 선재료를 구비하는 공정과, 이 선재료를 최저 약350℃로 가열하는 공정과, 이 선재료를 도포하는 공정을 구비한 프로우브침의 제조방법.A process comprising a wire material consisting of a gold-copper alloy of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper, a step of heating the wire material to at least about 350 ° C., and a step of applying the wire material Method for producing a probe needle. 74∼76중량부의 금과 24∼26중량부의 동과의 금-동합금으로 이루어지는 선재료를 구비한 공정과, 이 선재료의 저항값이 약 40%로 되도록 열처리하는 공정을 구비한 프로우브침의 제조방법.A probe having a wire material consisting of a gold-copper alloy of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper, and a heat treatment process for heat resistance so that the resistance value of the wire material is about 40%. Manufacturing method. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930016109A 1992-08-19 1993-08-19 Probe tip and a method of manufacturing the same KR100248570B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4244157A JP3048472B2 (en) 1992-08-19 1992-08-19 Probe device and probe needle
JP92-244157 1992-08-19

Publications (2)

Publication Number Publication Date
KR940004769A true KR940004769A (en) 1994-03-15
KR100248570B1 KR100248570B1 (en) 2000-03-15

Family

ID=17114616

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930016109A KR100248570B1 (en) 1992-08-19 1993-08-19 Probe tip and a method of manufacturing the same

Country Status (2)

Country Link
JP (1) JP3048472B2 (en)
KR (1) KR100248570B1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5730377A (en) * 1994-08-11 1998-03-24 Daiwa Seiko, Inc. Spinning reel for fishing capable of counteracting fishing line twist
US5769344A (en) * 1995-04-28 1998-06-23 Daiwa Seiko, Inc. Spinning reel for fishing having a line roller for reducing line twist
US5839681A (en) * 1992-10-16 1998-11-24 Daiwa Seiko Fishline guide mechanism for spinning reel
US5855327A (en) * 1994-10-31 1999-01-05 Daiwa Seiko, Inc. Fishline guide arrangement for spinning reel
KR20010046007A (en) * 1999-11-09 2001-06-05 강승언 The Fabrication of Micro Probe Tip Using Multi Etching Technology

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1737075B1 (en) * 2005-06-23 2017-03-08 Feinmetall GmbH Contacting device
JP5657881B2 (en) * 2009-12-09 2015-01-21 株式会社徳力本店 Probe pin material
KR102023742B1 (en) * 2019-01-31 2019-11-04 (주)래딕스 Test Pin Assembly

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5839681A (en) * 1992-10-16 1998-11-24 Daiwa Seiko Fishline guide mechanism for spinning reel
US5730377A (en) * 1994-08-11 1998-03-24 Daiwa Seiko, Inc. Spinning reel for fishing capable of counteracting fishing line twist
US5855327A (en) * 1994-10-31 1999-01-05 Daiwa Seiko, Inc. Fishline guide arrangement for spinning reel
US5984219A (en) * 1994-10-31 1999-11-16 Daiwa Seiko, Inc. Fishline guide arrangement for spinning reel
US6149087A (en) * 1994-10-31 2000-11-21 Daiwa Seiko, Inc. Fishline guide arrangement for spinning reel
US5769344A (en) * 1995-04-28 1998-06-23 Daiwa Seiko, Inc. Spinning reel for fishing having a line roller for reducing line twist
US5782418A (en) * 1995-04-28 1998-07-21 Daiwa Seiko, Inc. Spinning reel for fishing having an obliquely oriented line guide roller
KR20010046007A (en) * 1999-11-09 2001-06-05 강승언 The Fabrication of Micro Probe Tip Using Multi Etching Technology

Also Published As

Publication number Publication date
KR100248570B1 (en) 2000-03-15
JPH0666834A (en) 1994-03-11
JP3048472B2 (en) 2000-06-05

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