KR940003123B1 - Control apparatus to maintain vacuous pressure in a laser resonator - Google Patents

Abstract

On emptying for the initial vacuum, the 3rd or 5th solenoid valve opens for evacuating the remanent gas. If the degree of vacuum is sufficient and the specified pressure is reached, the valves are closed for allowing the gas to sustain the optimal pressure for a long time. The device includes a pressure transducer (12) for detecting a specified pressure and the state of internal pressure, a control circuit (13) for controlling the opening or closing states of the 1st and 2nd solenoid valves (14)(15), 3rd and 4th solenoid valves (16)(17) for forming the path of internal pressure, an air filter (20), a 5th solenoid valve (19) and an orifice (18).

Description

Vacuum pressure control device of laser resonator

1 is an example of a conventional apparatus.

2 is an embodiment of a vacuum pressure maintenance control apparatus according to the present invention.

Piping diagram of a gas furnace for explaining the operation of the apparatus of the present invention of Figures 3a, b.

* Explanation of symbols for main parts of the drawings

11 laser resonator 12 pressure transducer

13: Control circuit part 14, 15, 16, 17: 2-way solenoid valve

18: Orifice 19: 3-Way Solenoid Valve

20: air filter 21: vacuum pump

[Detailed description of the invention]

The present invention relates to a vacuum pressure maintenance control device of a laser resonator, and in particular, by setting the holding vacuum pressure of the laser resonator to allow the switching operation between the exhaust gas line and the pressure holding gas line to maintain an appropriate pressure efficiently It relates to a breakdown voltage retention control apparatus for a laser resonator.

Conventionally, the vacuum pump 21 via the valve | bulb valve 5 is provided in the output line of the laser resonator 11 with a pressure gauge not shown as shown in FIG.

That is, during the initial evacuation and exhaust, the valve valve 5 is opened to the maximum, and the vacuum pressure in the laser resonator 11 is exhausted by driving the vacuum pump 21. After the initial vacuum pressure is exhausted, the gas input stage of the laser resonator 11 is exhausted. At the same time as the gas inlet was observed while keeping the proper pressure in the laser resonator by closing the bowl valve 5 of the output stage while watching the pressure gauge not shown.

However, such a conventional device is difficult to maintain proper internal pressure in the resonator because the exhaust gas is discharged through the same gas line even when the initial vacuum is exhausted and the small amount of pressure during laser operation is exhausted. By doing so, it was not possible to accurately set the internal pressure, and there were many problems in use.

Therefore, the present invention connects the pressure transducer and the control circuit to the laser resonator to control the desired setting pressure electronically in order to solve the above problems of the prior art, so that there is no change in the internal pressure in the resonator even after a long time and the exhaust and pressure maintenance It is an object of the present invention to provide a vacuum pressure maintaining control device of a laser resonator capable of effectively functioning a function.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

2 shows a vacuum pressure maintaining control apparatus of the laser resonator according to the present invention, in which the vacuum pump 21 is used to absorb the vacuum pressure of the laser resonator 11, and the proper pressure in the laser resonator 11 is provided. A pressure transducer 12 which detects a setting and an internal pressure state, and is electrically connected to the pressure transducer 12 to open and control the first and second solenoid valves 14 and 15 according to whether or not an internally set vacuum state is present. The control circuit section 13, the third and fourth solenoid valves 16 and 17 which open only during the initial evacuation of the laser resonator 11 and form a path of the internal vacuum pressure, and the pressure transducer 12 And the first and second solenoid valves 14 and 15, which are controlled by the control circuit section 13 and maintain the set pressure in the laser resonator 11, are opened only during the exhaust and closed during the gas injection, and the air filter 20 through outside air A fifth solenoid valve 19 to be introduced, an air filter 20 for filtering foreign air to prevent foreign substances from entering, and an output line of the laser resonator 11 to stabilize the flow rate of pressure passing through the line The orifice 18 is provided.

The first and second solenoids 14 and 15 are two wear solenoid valves having an orifice with a small passage opening, and the first and second passages through the third and fourth solenoid valves 16 and 17. A two wear solenoid valve having an orifice larger than the orifices of solenoid valves 14 and 15.

The operation relationship of the present invention configured as described above will be described with reference to FIG.

First, as shown in FIG. ₂ , the vacuum pressure coexisting inside the laser resonator 11 is evacuated before the gas C0 ₂ , H ₂ , N ₂ is introduced into the laser resonator 11. When evacuating the initial vacuum pressure, the third to fifth solenoid valves 16, 17 and 19 are opened and the first and second solenoid valves 14 and 15 are closed.

The closing operation of the first and second solenoid valves 14 and 15 sends a closing signal from the control circuit part 13 by detecting the set pressure under the pressure transducer 12 attached to the laser resonator 11 to the output line. Leave some of the blocked.

In this state, when the third and fourth solenoid valves 16 and 17 for initial exhaust are opened, the remaining vacuum pressure outlet path in the laser resonator 11 passes through the orifice 18 as shown in FIG. Divided into the path through the third and fourth solenoid valves (16) and (17), and the exhaust gas through the three-way solenoid valve (19) through these paths is absorbed and exhausted by the vacuum pump (21). do.

On the other hand, after the remaining vacuum pressure of the laser resonator 11 is sufficiently back, a new gas is introduced through the gas input terminal of the laser resonator 11.

At this time, when the proper pressure is set in the pressure transducer 12 and the gas flowing into the laser resonator 11 reaches the set pressure, the pressure transducer 12 detects this and the current laser resonator 11 is transmitted to the control circuit 13. Send a signal to indicate the proper pressure in the chamber.

Accordingly, the control circuit unit 13 sends a signal to the first and second solenoid valves 14 and 15 to open the first and second solenoids 14 and 15 and at the same time the third to fifth solenoid valves ( When 16, 17 and 19 are closed, a gas path is formed as shown in FIG. 3B.

Therefore, since the fifth solenoid valve 19 is blocked, the gas exhausted through each output line of the laser resonator 11 does not flow out to maintain the pressure set in the pressure transducer 12 as it is.

As described above, the present invention opens the third to fifth solenoid valves at the time of initial evacuation and quickly exhausts the remaining vacuum in the laser resonator. By blocking the valve to prevent the gas from being discharged to the outside, it is possible not only to maintain a proper pressure without changing the internal pressure in the resonator even after a long time, but also to have a more efficient function of exhaust and pressure maintenance.

Claims (3)

A vacuum pump 210 for absorbing the vacuum pressure of the laser resonator 11, comprising: a pressure transducer 12 for detecting an appropriate pressure setting and an internal pressure state in the laser resonator 11, and the pressure transducer 12 ), A control circuit unit 13 electrically connected to the pressure transducer 12 and controlling the opening and closing of the first and second solenoid valves 14 and 15 according to whether or not the internal vacuum state is set, and the laser resonator 11. The laser is controlled by the third and fourth solenoid valves 16 and 17, and the pressure transducer 12 and the control circuit unit 13, which are opened only at the initial evacuation of the vacuum chamber and form a path of the internal vacuum pressure. First and second solenoid valves 14 and 15 for maintaining a set pressure in the resonator 11 and a fifth for opening only when exhausted and closed during gas injection to introduce external air through the air filter 20. The solenoid valve (19) and the outside air An air filter 20 for preventing the inflow of material and an orifice 18 installed on the output line of the laser resonator 11 to stabilize the outflow speed of the pressure passing through the line of the laser resonator Vacuum pressure control device. 2. The vacuum pressure maintenance control device for a laser resonator according to claim 1, wherein the first to fourth solenoid valves (14 to 17) are provided with a small orifice with a large passage opening. 3. Laser according to claim 1 or 2, characterized in that the orifice diameters of the third and fourth solenoid valves (16) and (17) are larger than the orifice diameters of the first and second solenoid valves (14) and (15). Vacuum pressure control device of resonator.